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Method for preparing micro-fluidic chip

A microfluidic chip and microfluidic channel technology, applied in manufacturing tools, welding equipment, laser welding equipment, etc., can solve the problems of inability to prepare microfluidic chips, increase in etching time, and reduce chip quality, and achieve good optical processing. Good performance, good repeatability and good light transmittance

Inactive Publication Date: 2011-10-19
HARBIN INST OF TECH AT WEIHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In recent years, many scientific and technological workers have been exploring the use of femtosecond lasers to prepare three-dimensional microfluidic chips through direct writing in silicon-based transparent media such as quartz, but limited by technical means, it is impossible to prepare larger-sized microfluidic chips because The traditional preparation technology mainly uses the method of femtosecond laser direct writing and then hydrofluoric acid etching. When preparing large-scale microfluidic chips, the time of hydrofluoric acid etching will also increase. The main defect lies in the open end of the microfluidic chip. The longer contact time with hydrofluoric acid causes the diameter of the channel at the open end to be significantly larger than the diameter of the inner channel, resulting in a decrease in chip quality

Method used

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Embodiment Construction

[0016] Below in conjunction with embodiment the present invention is further described.

[0017] A method for preparing a microfluidic chip, the specific steps of which are:

[0018] (1) Select the quartz base material, cut the base material into 3mm thick slices, polish them, fix the polished quartz slices on a fixture, and fix the fixtures on the bottom of a circular glass plate to ensure that the upper and lower surfaces of the quartz slices are horizontal , and then fix the circular glass plate and quartz thin slice on the three-dimensional platform.

[0019] (2) A liquid flushing device for assisting the femtosecond laser ablation of the glass substrate material and cleaning the microfluidic channels is installed under the thin slice on the three-dimensional platform. The liquid flushing device mainly includes a rubber hose and a pumping device, rubber One end of the hose is in close contact with the lower surface of the thin slice, tightly squeezes the lower surface of ...

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Abstract

The invention relates to a method for preparing a micro-fluidic chip. A glass substrate sheet is ablated by a femto-second laser; during the machining process, a cleaning solution always carries out effective cleaning on a machining part inside the sheet; heat treatment is carried out on the glass substrate sheet that is machined by the femto-second laser; after the heat treatment, the diameter of a micro-fluidic passage and the dimension of a liquid bath in the sheet are reduced; the internal surfaces of the micro-fluidic passage and the liquid bath are smooth; a PDMS (Polydimethylsiloxane) sheet is selected as a connecting body; the position on the PDMS sheet corresponding to the longitudinal passage opening position of a micro-fluidic glass chip is bored; and subsequently the PDMS sheet is bonded with the micro-fluidic glass chip, thereby obtaining the micro-fluidic chip. The method has simple machining process and ensures that the laser can carry out continuously stable ablation on substration material; and the integrated micro-fluidic chip with complex and multi-layer structures can be prepared in the glass substrate. The prepared micro-fluidic chip has the characteristics of miniaturization and integration, has the functions of separation, reaction and detection, and can be widely applied to the analysis fields.

Description

technical field [0001] The invention relates to an ultrafast laser microprocessing technology, in particular to a preparation method of a microfluidic chip. It uses femtosecond laser ablation to prepare microfluidic chips. technical background [0002] The microfluidic chip is the core of the microanalysis system. The invention of the microfluidic chip promotes the development of analytical instruments used in chemistry, food, environment, medicine and life sciences in the direction of miniaturization, automation, integration and portability. The flow chip detects various chemical reactions, significantly reduces reagent consumption, and greatly improves analysis efficiency and reduces costs. The design and production of microfluidic chips composed of microfluidic channel networks can be used in different analytical fields, including chemical analysis, food hygiene, environmental monitoring, medical testing, life sciences, criminal sciences, and national defense. [0003] ...

Claims

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Application Information

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IPC IPC(8): B23K26/00B23K26/16C03C23/00B23K26/362
Inventor 曲士良李岩
Owner HARBIN INST OF TECH AT WEIHAI
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