Anti-reflection coating of crystalline silicon solar cell and preparation method thereof

A technology of crystalline silicon solar cells and anti-reflection coatings, which is applied in the manufacture of circuits, electrical components, and final products, can solve the problems of poor hydrogen passivation effects of anti-reflection films, inability to meet the needs of solar cells, and poor anti-reflection effects. Achieve clear industrialization prospects, easy to operate and realize, and easy to master
CN102244109BActive Publication Date: 2013-06-12XIAN HUANGHE PHOTOVOLTAIC TECH
4 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XIAN HUANGHE PHOTOVOLTAIC TECH
Publication Date
2013-06-12

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
Patent Text Reader

Abstract

The invention discloses an anti-reflection coating of a crystalline silicon solar cell and a preparation method for the anti-reflection coating. The refraction index is increased from top to bottom at equal rate, wherein the minimum refraction index is 1.95, and the maximum refraction index is 2.45. The preparation method comprises the following steps of: bearing monocrystal or polycrystalline silicon by using graphite boat; depositing the coating through glow discharge under the condition that silane and ammonia gas are introduced; and annealing after the glow discharge is finished, wherein the silane flow continuously decreases with the glow time and the ammonia gas flow continuously increases with glow time. The anti-reflection coating of the crystalline silicon solar cell has better anti-reflection effect, the generation quantity of photon-generated carriers is increased, additional equipment or device is not needed, and the method is simple and easy to master, and has the characteristics of convenience for operation, repetition and reliability.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to the preparation of a solar cell anti-reflection film, belonging to the field of solar cell device preparation. Background technique

[0002] Crystalline silicon solar cells are a clean, non-polluting green energy source that converts light energy into electrical energy through solar radiation, and the production of anti-reflective coatings is a key factor affecting their photoelectric conversion efficiency. In industrial production, generally only a layer of Si with a single refractive index is made on the surface of the silicon wafer. x N y The film has a good anti-reflection effect on light within a certain wavelength range, but has a slightly poor anti-reflection effect on light at other wavelengths. Combining the spectral response and solar spectral characteristics of silicon materials, crystalline silicon Si x N y The anti-reflection coating needs to be in the range of 350-1050nm to have the best anti-reflection effect...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More