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Preparation method of drug-delivery type three-dimensional carbon microelectrode with microfluid channel

A microfluidic channel, carbon microelectrode technology, applied in microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems of easy electrochemical corrosion, low electrode thickness, limited charge transfer capacity, etc. Low, enhanced electrode effect, good electrical properties

Active Publication Date: 2014-02-19
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its disadvantages are: the use of noble metal Pt or Au as the electrode, the electrode thickness is low, the charge transport capacity is limited, and it is easy to be electrochemically corroded

Method used

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  • Preparation method of drug-delivery type three-dimensional carbon microelectrode with microfluid channel
  • Preparation method of drug-delivery type three-dimensional carbon microelectrode with microfluid channel
  • Preparation method of drug-delivery type three-dimensional carbon microelectrode with microfluid channel

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] In this embodiment, the height of the cylindrical stimulation point made of SU-8 glue is 70 to 100 microns, which is used to stick on the surface of the dura mater of the optic nerve or cerebral cortex to stimulate the optic nerve or cerebral cortex to restore nerve function .

[0043] Such as Figure 1 to Figure 8 As shown, this embodiment includes the following steps:

[0044] Step 1: Clean the silicon wafer 1, use the silicon wafer 1 as the substrate, and grow the first layer of SiO on the polished surface of the silicon wafer by PECVD 2 2. Such as figure 1 shown.

[0045] The silicon chip is N-type or P-type single crystal silicon.

[0046] Step 2, in the first layer of SiO 2 On 2, use LPCVD to grow silicon nitride 3 as the first sacrificial layer, and use PECVD to grow the second layer of SiO on silicon nitride 2 4. Such as figure 2 , image 3 shown.

[0047] The thickness of the first sacrificial layer 3 is 0.15 μm;

[0048] The second layer of SiO...

Embodiment 2

[0071] In this embodiment, the cylindrical stimulation point made of SU-8 glue has a height of 300 to 500 microns, which is used to penetrate the dura mater and stick on the surface of the pia mater to stimulate the optic nerve or cerebral cortex to restore nerve function.

[0072] Such as figure 1 As shown, this embodiment includes the following steps:

[0073] Step 1: Clean the silicon wafer 1, use the silicon wafer 1 as the substrate, and grow the first layer of SiO on the polished surface of the silicon wafer by PECVD 2 2. As shown in figure (a).

[0074] The silicon chip is N-type or P-type single crystal silicon.

[0075] Step 2, in the first layer of SiO 2 On 2, use LPCVD to grow silicon nitride 3 as the first sacrificial layer, and use PECVD to grow the second layer of SiO on silicon nitride 2 4. As shown in Figure (b) (c).

[0076] The thickness of the first sacrificial layer 3 is 0.15 μm;

[0077] The second layer of SiO 2 4 has a thickness of 30 μm;

...

Embodiment 3

[0100] AZ4620 glue is used as the first sacrificial layer to form a microfluidic channel with a depth of 30 microns, which is used to inject medicinal liquid into the living body, reduce the body's rejection reaction to the implanted microneedle, and enhance the efficiency of nerve function repair.

[0101] Such as figure 1 As shown, this embodiment includes the following steps:

[0102] Step 1: Clean the silicon wafer 1, use the silicon wafer 1 as the substrate, and grow the first layer of SiO on the polished surface of the silicon wafer by PECVD 2 2. As shown in figure (a).

[0103] The silicon chip is N-type or P-type single crystal silicon.

[0104] Step 2, in the first layer of SiO 2 On 2, use LPCVD to grow silicon nitride 3 as the first sacrificial layer, and use PECVD to grow the second layer of SiO on silicon nitride 2 4. As shown in Figure (b) (c).

[0105] The thickness of the first sacrificial layer 3 is 0.15 μm;

[0106] The second layer of SiO 2 4 has...

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Abstract

The invention discloses a preparation method of a drug-delivery type three-dimensional carbon microelectrode with a microfluid channel. The method comprises the following steps: taking a silicon slice as a substrate material, and taking BCB (benzo-cyclo-butene) as an electrode surface material; and preparing the drug-delivery type three-dimensional carbon microelectrode with the microfluid channel by sufficiently using the deep exposure thickness of an SU-8 glue and combining with a C-MEMS (carbon-micro electro mechanical system) technology. By using the preparation method provided by the invention, the process steps of sputtering precious metal are reduced, a photoresist is carbonized through a high temperature, and good electric characteristics are obtained, and the carbon electrode is hard to etch. The method provided by the invention directly uses the SU-8 glue to thicken the electrode to enhance the close contact of the electrode and the tissue, and the cost is lower than that of electroplating. The microfluid channel in the carbon microelectrode prepared from the method provided by the invention can be used as an inlet for drug delivery to input the medical liquid to reduce the rejection action of an organism and enhance the effect of the electrode. The BCB with low dielectric property is used as a surface layer material with high waterproofness and good biocompatibility, and the material is suitable for long-time implantation in vivo.

Description

technical field [0001] The invention relates to a preparation method of a three-dimensional carbon microelectrode, in particular to a preparation method of a drug-drug three-dimensional carbon microelectrode with a microfluidic channel. Background technique [0002] Because traditional drug therapy is difficult to heal nerve damage, the medical community has increasingly turned its attention to nerve repair methods based on artificial electronic devices, that is, by applying electrical stimulation signals to the biological nerve-muscular system to replace the original sensory or neural repair methods. Damaged neural pathways are repaired by means of electrical signals sent by the central nervous system. At present, this nerve repair method has achieved good clinical results, and has been widely studied and applied. For patients with severe optic nerve damage, microelectrodes implanted in the eyeball or brain can be used to directly stimulate the optic nerve, and nerve elect...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
Inventor 隋晓红柴新禹罗雪娇夏年生林俐
Owner SHANGHAI JIAOTONG UNIV