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Rare earth and silicon compound precision type rare earth polishing powder and preparation method thereof

A kind of rare earth polishing powder, precision type technology, applied in the direction of polishing composition containing abrasives, etc., can solve the problems of high production cost, low polishing abrasive throwing amount, irreplaceable, etc., and achieve product throwing amount and wear resistance High, simple production process, low cost effect

Active Publication Date: 2013-12-18
方复(上海)新材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The silicon oxide / cerium oxide composite abrasive grains prepared by the above method are mainly used in the chemical mechanical polishing of VLSI silicon dioxide dielectric layer, glass substrate and STI, because of the limitation of the preparation method (not high temperature roasting), resulting in polishing abrasives The amount of abrasion is low, and it cannot replace the polishing powder currently used in the fields of optical components, liquid crystal displays, flat-panel displays, mobile phone windows, etc.; secondly, in this preparation method, silica sol or water glass is used as the silicon source. Silica sol, and has high requirements for silica sol, is not suitable for the preparation of silicon oxide / cerium oxide in rare earth polishing powder; again, whether it is hydrothermal crystallization, heating reaction in autoclave, reflux at 100°C
[0011] Chai Mingxia et al. in "Journal of Inorganic Chemistry" 2007, (4): 623-629: "SiO 2 -CeO 2 "Preparation and polishing performance of composite oxides" also mentioned the application of silicon oxide-cerium oxide composite abrasives in glass polishing. It leads to high production cost; and the aging time is too long (one week)
Therefore, this method is not suitable for industrial production and industrialization

Method used

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  • Rare earth and silicon compound precision type rare earth polishing powder and preparation method thereof
  • Rare earth and silicon compound precision type rare earth polishing powder and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Under stirring conditions, 111g of cerium carbonate (REO is 45%, CeO 2 / TREO: 99.5%) was added to 500g of deionized water, dissolved with nitric acid to pH=2, filtered to obtain a clear and transparent solution; 25g of precipitated silica and 25g of fumed silica were added to the above solution and stirred for 0.5 After h, heat to 40°C to obtain slurry A;

[0041] Add 100g / L ammonium bicarbonate aqueous solution to slurry A, control the end point to pH 7, to obtain slurry B;

[0042] The slurry B is centrifuged to dehydrate and dried to obtain the precursor C;

[0043] After calcining C at 950°C for 5 hours, the calcined product is pulverized by airflow to D50=1.99μm, and the target product is a rare earth-silicon compound precision rare earth polishing powder. It is composed of silicon oxide and cerium oxide. Rare earth polishing powder, including: silicon oxide 50%, rare earth oxide 50%.

Embodiment 2

[0045] Under stirring conditions, 167g lanthanum cerium carbonate (REO is 48%, CeO 2 / TREO is 60%) added to 500g deionized water, dissolved with hydrochloric acid to pH=2, filtered to obtain a clear and transparent solution;

[0046] Add 5g fumed silica, 10g quartz powder, and 5g silica powder to the above solution, stir for 1 hour and then heat to 80°C to obtain slurry A;

[0047] Add 200g / L ammonium bicarbonate aqueous solution to slurry A, control the end point to pH 8, to obtain slurry B;

[0048] The slurry B is centrifuged to dehydrate and dried to obtain the precursor C;

[0049] After C is calcined at 1050°C for 3 hours, the calcined product is pulverized by airflow to D50=3.0 μm to obtain the target product, a rare earth-silicon composite precision rare earth polishing powder, which is a rare earth polishing powder composed of silicon oxide and lanthanum cerium oxide. Silicon oxide 20%, rare earth oxide 80%.

Embodiment 3

[0051] Under stirring conditions, 211g lanthanum cerium praseodymium carbonate (REO is 45%, CeO 2 / TREO is 65%) was added to 500g deionized water, dissolved with nitric acid to pH=2, filtered to obtain a clear and transparent solution; 5g precipitated silica was added to the above solution, stirred for 0.5h and heated to 60℃, To obtain slurry A;

[0052] Add 100g / L ammonium bicarbonate aqueous solution to slurry A, control the end point to pH 7, to obtain slurry B;

[0053] The slurry B is centrifuged to dehydrate and dried to obtain the precursor C;

[0054] After calcining C at 950°C for 6 hours, the calcined product is pulverized by airflow to D50=1.2μm, and the target product is a precision rare earth polishing powder composed of rare earth-silicon compound, which is a rare earth polishing powder composed of silicon oxide and lanthanum cerium praseodymium . 5% silicon oxide, 95% rare earth oxide.

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Abstract

The invention provides rare earth and silicon compound precision type rare earth polishing powder and a preparation method thereof. The rare earth and silicon compound precision type rare earth polishing powder comprises the following ingredients in percentage by mass: 5-50% of silicon oxide and 50-95% of rare earth oxide. Compared with the prior art, the rare earth and silicon compound precision type rare earth polishing powder and the preparation method thereof, provided by the invention, have the advantages of low cost, simple producing process, high polishing amount of the product, high wear resistance and the like.

Description

Technical field [0001] The invention relates to a precision rare earth polishing powder and a preparation method thereof, and more specifically, to a rare earth-silicon compound rare earth polishing powder and a preparation method thereof. Background technique [0002] Rare earth polishing powder is used for polishing lenses, flat glass, glass bulbs, glasses, watch cases, etc. It has the characteristics of fast polishing speed and high precision. Since the invention of rare earth polishing powder in the 1940s, the production volume and application volume have gradually increased. The production process of rare earth polishing powder changes with the progress of rare earth separation technology. With the rapid development of the information industry in recent years, there has been an increasing demand for polishing powders for liquid crystal displays, flat displays, and optical components, and the requirements for polishing accuracy have become higher and higher. [0003] Early ra...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09G1/02
Inventor 赵月昌高璐蒙素玲曹红霞杨筱琼高玮
Owner 方复(上海)新材料科技有限公司
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