Lanthanum-aluminum alloy nano cluster-embedded metal ceramic solar energy absorption coating and method thereof
A solar energy absorption, cermet technology, applied in metal material coating process, solar thermal power generation, metal layered products, etc., can solve the problems of affecting production efficiency, not being well promoted, increasing the difficulty of coating, etc., to achieve output The effect of large size, good thermal stability and simple preparation method
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[0077] The present invention adopts the preparation method of this equipment to carry out in the following order of operations:
[0078] The first step is to prepare the first layer: directly use the lanthanum aluminum alloy target (LaAl) magnetron sputtering to prepare the metal reflective layer thin film. First pump the vacuum of the high vacuum sputtering chamber to better than 5×10 -4 Pa, from the argon (Ar) inlet pipe 4 into the working gas argon, the air pressure is controlled at 5Pa ~ 5 × 10 -2 Pa, the usual recommended working pressure is 1Pa~5×10 -1 Pa;
[0079] Turn on the DC or pulsed DC sputtering power supply (not marked in the figure), the voltage is controlled at 250-600V, the recommended sputtering voltage is 300-350V; the sputtering current density is controlled at 5-250mA / cm 2 , the recommended sputtering current density is 50-80mA / cm 2 ; Sputtering power control in 2 ~ 150w / cm 2 , the recommended sputtering power is 15~40w / cm 2 ; The sputtering rate is...
Embodiment 1
[0107] The high-temperature solar energy selective absorption coating in the high-temperature solar heat collector tube of the LaAl-N-LaAl strain is produced in a single-chamber single-target vacuum sputtering furnace 8 . A sputtering target 2 is made of lanthanum aluminum alloy (LaAl) (the atomic ratio of the alloy composition of lanthanum and aluminum is 3:7), and the working parameters adopted are as shown in Table 8:
[0108] Table 8
[0109]
[0110] The first layer of the solar selective absorption coating is a rare earth lanthanum aluminum alloy (LaAl) reflective layer film, the second layer is a cermet absorber film (LaAlN) embedded with rare earth lanthanum aluminum alloy (LaAl), and the third layer is nitrogen Lanthanum aluminum anti-reflection layer film (LaAlN).
Embodiment 2
[0112] The high-temperature solar energy selective absorption coating in the middle-temperature solar heat collector tube of LaAl-N-LaAl series is produced in a single-chamber three-target vacuum sputtering furnace 10 . The materials of the three sputtering targets 2 are all lanthanum aluminum alloy (LaAl) (the atomic ratio of the alloy composition of lanthanum and aluminum is 4:6), and the working parameters adopted are shown in Table 9:
[0113] Table 9
[0114]
[0115]
[0116] Same as the single-chamber single-target sputtering equipment, the first layer of the solar selective absorption film is a lanthanum aluminum alloy (LaAl) reflective layer film, and the second layer is a cermet absorber film (LaAlN) embedded with lanthanum aluminum alloy (LaAl). ), the third layer is lanthanum aluminum nitride anti-reflection layer film (LaAlN).
[0117] It is determined that the medium and high temperature solar selective absorbing coating obtained in the above two examples ...
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Abstract
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