Five-port capacitance type microwave power sensor based on micro mechanical clamped beam

A technology of microwave power and fixed beams, which is applied in the direction of electric power measurement by thermal method, electric solid devices, instruments, etc.

Inactive Publication Date: 2012-04-11
SOUTHEAST UNIV
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

It has the advantages of low loss, high sensitivity and good linearity. However, its biggest disadvantage is that a microwave power sensor can only measure the...

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  • Five-port capacitance type microwave power sensor based on micro mechanical clamped beam
  • Five-port capacitance type microwave power sensor based on micro mechanical clamped beam
  • Five-port capacitance type microwave power sensor based on micro mechanical clamped beam

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Embodiment Construction

[0045] The specific implementation scheme of the five-port capacitive microwave power sensor based on micro-mechanical fixed beams invented in this paper is as follows:

[0046] Five CPWs 6, five MEMS fixed beams 7, anchor regions 8 of the fixed beams, sensing electrodes 9, pressure soldering blocks 12 of the sensing electrodes, and ten terminal matching resistors are arranged on the gallium arsenide substrate 21 13. A thermopile consisting of five pairs of thermocouples 14 composed of ten thermocouples 14, two output pressure welding blocks 18, a metal heat sink 17, air bridge 10 and connecting wires 19, forming a thermopile under the substrate 21 MEMS substrate film structure 20:

[0047] The CPW 6 is used to realize the transmission of the microwave signal, and the circuit connection between the test instrument and the terminal matching resistor 13 . Each CPW 6 consists of a CPW signal line and two ground lines.

[0048] The five MEMS fixed beams 7 straddle the five symme...

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Abstract

The invention provides a five-port capacitance type microwave power sensor based on a micro mechanical clamped beam, which not only has the advantages of the traditional thermoelectric type power sensor of low loss, high sensitivity and good linearity, but also realizes the measurement of the microwave power of five ports. Meanwhile, some ports into which the microwave power is input can be detected and the proportion of a watt level of the microwave power can be detected; and the five-port capacitance type microwave power sensor has the advantages of high integrated level and compatibility with a gallium arsenide monolithic microwave integrated circuit. In the structure, five CPW (Coplanar Waveguide) input ends for transmitting microwave signals are arranged on a gallium arsenide substrate, the input ends are symmetrically placed and form a 72-degree angle between every two input ends; each CPW output end is connected with two terminal matched resistors and a thermoelectric couple isarranged near each terminal resistor; the five pairs of thermoelectric couples are symmetrically placed and are connected in series to form a thermoelectric pile and the angle between every two of the five pairs of thermoelectric couples is also 72 degrees; an MEMS (Micro Electro Mechanical System) clamped beam is stretched across each CPW and two anchor areas of the clamped beam are located outside a CPW earth wire; and a sensing electrode is placed between a CPW signal wire and the CPW earth wire.

Description

technical field [0001] The invention proposes a five-port capacitive microwave power sensor based on a micromechanical fixed support beam and its preparation, belonging to the technical field of microelectromechanical systems (MEMS). Background technique [0002] In the research of microwave technology, microwave power is an important parameter to characterize the characteristics of microwave signals. In the research of microwave signal generation, transmission and reception, microwave power measurement is indispensable, and it has become an important component of electromagnetic measurement. part. In recent years, with the rapid development of MEMS technology, microwave power sensors based on thermocouples are one of the widely used devices. Its working principle is to use the terminal matching resistance to absorb the input microwave power to generate heat, and detect the temperature difference near the matching resistance by placing a thermopile near the terminal matchin...

Claims

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Application Information

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IPC IPC(8): G01R21/02B81B7/00B81C1/00
Inventor 廖小平张志强
Owner SOUTHEAST UNIV
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