Protector chip of light emitting diode and production technology thereof
A technology of light-emitting diodes and protection devices, which is applied in the field of protection device chips and production processes of light-emitting diodes, can solve problems such as inability to use light-emitting diodes to protect devices, low working voltage of light-emitting diodes, and inability to illuminate circuits, so as to improve reliability and anti-corrosion Surge capability, strong automatic recovery ability after circuit power failure, and fast switching speed
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[0027] In order to understand the present invention more clearly, describe the present invention in detail in conjunction with accompanying drawing:
[0028] The protection device chip structure of the light emitting diode is N-P-N-P-N type.
[0029] Such as figure 1 The planar structure of the chip of the protection device of the light-emitting diode is as follows: chip 1, corrosion groove 2, passivation glass 3, metal layer 4, high-concentration N region 5;
[0030] Such as figure 2 The chip sectional structure of the protection device of the light emitting diode shown is as follows: corrosion trench 2, passivation glass 3, metal layer 4, high-concentration N region 5, P region 6, and base region N7.
[0031] Such as image 3 The chip process flow of the protective device for the light emitting diode shown is as follows:
[0032] 1) Pre-oxidation treatment: chemically treat the surface of silicon wafers through acid, alkali, deionized water and other processes;
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