Chemical vapor synthesis method for growing carbon nanotubes in mode of being attached to wall of pore channel of template

A technology of carbon nanotubes and chemical vapor phase, applied in the direction of carbon nanotubes, nanocarbon, nanotechnology, etc., can solve the problems of difficult growth of carbon nanotubes, complex process, expensive equipment, etc. little effect

Active Publication Date: 2012-06-20
南京莱赛康智能装备有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the carbon nanotubes grown on the template by this method are small in diameter and low in density, and it is difficult to grow a sufficient number of carbon nanotubes.
[0008] Existing methods have disadvantages such as complex process, expensive equipment, and the diameter and density of the grown carbon nanotubes do not meet the requirements.

Method used

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  • Chemical vapor synthesis method for growing carbon nanotubes in mode of being attached to wall of pore channel of template
  • Chemical vapor synthesis method for growing carbon nanotubes in mode of being attached to wall of pore channel of template
  • Chemical vapor synthesis method for growing carbon nanotubes in mode of being attached to wall of pore channel of template

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Experimental program
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Effect test

Embodiment 1

[0032] Such as figure 1 As shown, a method for growing carbon nanotubes by chemical vapor synthesis attached to the channel wall of the template includes the following steps: putting the anodized aluminum channel array template with a pore diameter of 100 nm and a thickness of 60 μm into a chemical vapor deposition vacuum device horizontal vacuum tube type In the high-temperature reaction furnace, evacuate to about 15Pa, pass in 20sccm of hydrogen and 180sccm of argon, maintain the pressure at 1000Pa, raise the temperature to 500°C, and keep the treatment time for 2h; then change the flow rate of argon to 160sccm, and then pass in 20sccm acetylene, the pressure was maintained at 1000Pa, and the reaction was carried out for 2 hours; the heating power was turned off, cooled naturally, and the sample was taken out, and the obtained product was a neat array of large-diameter carbon nanotubes, with a morphology as follows figure 2 , 3 shown.

Embodiment 2

[0034] Put the anodized aluminum channel array template with a pore size of 50nm and a thickness of 30μm into a horizontal vacuum tube high-temperature reaction furnace of a chemical vapor deposition device, and evacuate it to about 15Pa; 100Pa, raise the temperature to 700°C, and keep the treatment time for 1h; stop feeding hydrogen, change the flow rate of argon to 130sccm, feed 20sccm of acetylene, keep the pressure at 5000Pa, and react for 1h; turn off the heating power, cool down, and get the sample.

Embodiment 3

[0036] Put the anodized aluminum channel array template with a pore size of 150nm and a thickness of 60μm into a horizontal vacuum tube high-temperature reaction furnace of a chemical vapor deposition device, and vacuumize it to about 15Pa; 5000Pa, heat up to 400°C, keep the treatment time for 2h; continue to heat up to 750°C, stop feeding hydrogen, change the flow rate of argon to 160sccm, pass in 40sccm of acetylene, keep the pressure at 4000Pa, react for 2h; turn off the heating power, Cool to obtain a sample.

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Abstract

The invention relates to a chemical vapor synthesis method for growing carbon nanotubes in a mode of being attached to the wall of a pore channel of a template without a metal catalyst. The method comprises the following main steps of: raising the temperature of a horizontal vacuum tube high temperature furnace to be between 400 and 600 DEG C under the condition that oxide exists on the surface of the inner wall of the pore channel, introducing mixed gas of hydrogen and inert gas, preserving heat, introducing mixed gas of carbon source gas and carrier gas, and growing the carbon nanotubes in a mode that a decomposition product of the carbon source gas is attached to the pore wall in the pore channel of the template in the high temperature furnace. Compared with the prior art, the method for preparing the carbon nanotubes has the advantages that: the metal catalyst is not needed, the carbon nanotubes of which the diameter is the same as that of the pore channel are prepared and occupy an inner cavity of the pore channel furthest, the method is easy to operate, environment-friendly and low in cost, toxicity is avoided, a few steps are performed, the requirement of large-scale production is met, and the like.

Description

technical field [0001] The invention relates to a method for growing carbon nanotubes, in particular to a method for growing carbon nanotubes by attaching a template hole wall by using a chemical vapor deposition process without adding additional metal catalysts. Background technique [0002] Carbon nanotubes are one-dimensional nanomaterials with excellent properties. A lot of research work in recent years has revealed the unique electrical, physical, chemical and mechanical properties of carbon nanotubes. Current studies have found that the potential application fields of carbon nanotubes mainly include: nanoelectronic devices, sensors, field emission, batteries, hydrogen storage, display and composite materials. Carbon nanotubes are mainly obtained by arc discharge method, laser evaporation method and chemical vapor deposition method. [0003] In recent years, the research reports on the growth of carbon nanotubes in template channels all require the use of metal cataly...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/02B82Y40/00C01B32/16
Inventor 杨志程应武张亚非魏浩陈三娟
Owner 南京莱赛康智能装备有限公司
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