Polishing solution used for precision machining of optical communication ZrO2 ceramic stub and preparation method thereof

A ceramic ferrule and precision machining technology, which is applied in the field of polishing liquid, can solve the problems of uncoordinated polishing efficiency and polishing precision, and can not achieve the polishing effect, and achieve the effects of easy dispersion, easy cleaning, and good application performance

Inactive Publication Date: 2012-06-20
HENAN CHEM IND RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, provide a polishing solution containing mixed abrasives of cerium oxide and alumina micropowder, and solve the problem of uncoordinated polishing efficiency and polishing accuracy of using a single inorganic abrasive in traditional CMP technology , to achieve a polishing effect that cannot be achieved by a single abrasive, and the invention also provides a preparation method for the polishing liquid

Method used

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  • Polishing solution used for precision machining of optical communication ZrO2 ceramic stub and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0034] Example 1 Optical communication Zr0 2 Polishing liquid for precision machining of ceramic ferrule and preparation method thereof

[0035] Take 51.2 grams of CeO 2 (average particle size of 0.78μm) and 12.8 grams of Al 2 o 3 (average particle size is 0.5μm) micropowder, add 300 grams of deionized water and 0.32 grams of nitric acid, stir and disperse in the stirring disperser for 0.5h, add 1.6 grams of glycerol, 2.4 grams of polyvinyl alcohol derivatives, 0.16 grams of nonyl Phenol polyoxyethylene ether and 431 grams of deionized water, continue to stir and disperse for 2.0 hours, add triethanolamine to adjust the pH value to 4.5, disperse by ultrasonic waves for 20 minutes, and sieve to obtain the solid content (CeO 2 、Al 2 o 3 Micropowder) is a suspension solution of 8.0%wt, and the viscosity of the dispersion is 0.015Pa.s, which is the polishing solution of the present invention.

example 2

[0036] Example 2 Optical communication Zr0 2 Polishing liquid for precision machining of ceramic ferrule and preparation method thereof

[0037] Take 48 grams of CeO 2 (average particle size of 0.78μm) and 16 grams of Al 2 o 3 (average particle size of 0.5 μm) micropowder, add 300 grams of deionized water and 0.32 grams of nitric acid, stir and disperse in a stirring disperser for 0.5 hours, add 1.6 grams of glycerol, 2.4 grams of polyvinyl alcohol, 0.16 grams of nonylphenol poly Oxyethylene ether and 431 grams of deionized water, continue to stir and disperse for 2.0 hours, adjust the pH value to 4.5 with triethanolamine, disperse by ultrasonic waves for 20 minutes, and sieve to obtain a suspension solution with a solid content of 8.0%wt. The viscosity of the dispersion is 0.016Pa. s is the polishing liquid of the present invention.

example 3

[0038] Example 3 Optical communication Zr0 2 Polishing liquid for precision machining of ceramic ferrule and preparation method thereof

[0039] Take 42.6 grams of CeO 2 (average particle size of 0.78 μm) and 21.4 grams of Al 2 o 3 (average particle size of 0.5 μm) micropowder, add 300 grams of deionized water and 0.32 grams of nitric acid, stir and disperse in a stirring disperser for 0.5 hours, add 1.6 grams of glycerol, 2.4 grams of polyvinyl alcohol, 0.16 grams of nonylphenol poly Oxyethylene ether and 431 grams of deionized water, continue to stir and disperse for 2.0 hours, adjust the pH value to 4.5 with triethanolamine, disperse by ultrasonic wave for 20 minutes, and sieve to obtain a suspension solution with a solid content of 8.0%wt. The viscosity of the dispersion is 0.015Pa. s is the polishing liquid of the present invention.

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Abstract

The invention discloses a polishing solution used for precision machining of an optical communication ZrO2 ceramic stub and a preparation method thereof. The polishing solution is composed of 0.5 to 12% of cerium oxides, 0.1 to 4% of aluminum oxide, 0.01 to 0.1% of moisture regulators, 0.05 to 2% of dispersants, 0.01 to 4% of dispersion stabilizers, 0.005 to 0.5% of cosurfactants and the balance of deionized water. The preparation method comprises the following steps of: loading cerium oxides and aluminum oxide into a mixing disperser, adding a part of deionized water and a part of moisture regulators, thoroughly mixing, adding the rest additives and the rest deionized water, mixing again, adjusting pH to 2 to 5, and ultrasonically dispersing. The invention solves the problem of incoordination between polishing efficiency and polishing precision in the conventional CMP process using single inorganic grinding material, achieves the polishing effect which can not be reached by single inorganic grinding material, can not only increase polishing efficiency but also improve polishing precision, and has good application performances.

Description

[0001] technical field [0002] The present invention relates to a kind of polishing fluid for precise processing, particularly relate to a kind of optical communication Zr0 2 A polishing fluid for precision machining of ceramic ferrules and a preparation method thereof. Background technique [0003] In recent years, optical communication has developed extremely rapidly. On the one hand, it is developing in the direction of ultra-high speed, large capacity, and long distance; on the other hand, the optical fiber LAN user system has been vigorously developed. All-optical communication is the inevitable direction of optical communication development. In the modern optical fiber communication industry, optical fiber connectors are the most widely used optical passive devices and have the greatest impact on the transmission quality of optical fiber communication. to the receiving optical fiber, and guarantee the transmission quality. The core and basic components of fiber opti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09G1/02
Inventor 刘玉林梁遂芳汪心想
Owner HENAN CHEM IND RES INST
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