Generating device of plasma ion source

Abstract

The invention relates to a generating device of a plasma ion source, wherein the generating device is applied to a mass spectrometer. The generating device comprises: a plasma generation cavity, which includes a cavity chamber used as a plasma generation zone; a high voltage radio frequency source, which includes a power supply and a radio frequency electrode arranged at an outer surface of the plasma generation cavity; a transmission structure, which is communicated with the plasma generation cavity and is used for introducing sample gas and carrier gas into the plasma generation cavity; and a sealing element, which is used for sealing communication space between the transmission structure and the plasma generation cavity so as to provide a vacuum environment for the plasma generation cavity. Compared with the prior art, the technology employed in the invention enables the generating device of a plasma ion source to have the following beneficial effects: the plasma generation cavity is utilized, so that a plasma ion source with high density can be generated in a low vacuum environment.

Description

technical field [0001] The invention relates to a mass spectrometry technology, in particular to a generating device of a plasma ion source in a low vacuum environment. Background technique [0002] Mass spectrometry is one of the most accurate methods for molecular structure analysis. It is usually used for qualitative analysis of unknowns and quantitative detection of known components in mixtures. Among them, ion source is the key technology of mass spectrometry. [0003] The most commonly used ion source is electron ionization (Electron Ionization, EI), which uses high-energy electron beams to bombard the sample, so that the sample is ionized to generate electrons and molecular ions. The principle is as follows: [0004] M+e→M + +2e [0005] m + Continued to be bombarded by electrons to cause chemical bond breaking or molecular rearrangement, and a variety of fragment ions are generated instantly. The use of EI sources is extremely extensive, the ionization efficienc...

AI Technical Summary

Problems solved by technology

[0011] The energy of photoionization is still relatively high. For macromolecular organic substances (such as petroleum), if fragments are generated, the spectrum will be very complicated, and it will be difficult to analyze, so the accuracy of the results obtained by analyzing samples is not high.

And photoionization needs to generate ionized photons, and requires the light-transmitting body to be exposed to the sample to be analyzed, which can easily reduce the life of the light-transmitting body

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