Hot filament rack for large-area deposited diamond film and manufacturing method of hot filament rack

Abstract

The invention relates to the field of chemical-vapor-deposited diamond films, particularly relates to a hot filament rack in a hot filament chemical vapor deposition device and a manufacturing method of the hot filament rack. The hot filament device comprises a left molybdenum electrode (1), a right molybdenum electrode (2), a pin with a groove (3), an arc-shaped groove (4), a spring bracket (5), an outer edge strip (6), a plurality of equally long filaments (7), two support rods (8) and a spring (9). The entire hot filament rack is firstly integrally installed outside a deposition chamber; after all the filaments are arranged, the entire filament array is placed in a reaction chamber; the left and the right molybdenum electrodes and four water-cooled copper electrode pillars (10) are connected; after the hot filament rack is fixed, the two support rods (8) are removed and then the chamber is closed for experiments. The hot filament rack provided by the invention can overcome some technical defects in the prior art, improve the utilization rate and stability of hot filaments, and can be used for preparing large-area diamond films.

Description

[0001] Technical field: [0002] The invention relates to the field of chemical vapor deposition diamond films, in particular to a hot wire rack in a hot wire chemical vapor deposition device and a manufacturing method thereof. [0003] Background technique: [0004] At present, the preparation technology of diamond film mainly includes microwave plasma chemical vapor deposition, direct current plasma jet chemical vapor deposition, hot filament chemical vapor deposition and so on. Compared with the other two technologies, the hot wire method can prepare large-area diamond films with the lowest overall cost, and has a good potential for industrial promotion. [0005] The design of the hot wire rack is the core content of the hot wire CVD deposition system to prepare large-area diamond films. After the horizontally arranged hot wire array is energized, the hot wires are rapidly heated, which expands and increases in length. If the filament elongation cannot be eliminated in time at t...

AI Technical Summary

Problems solved by technology

For example, during long-term equipment operation, if the cooling at the connection between the movable electrode and the wire cannot be effectively evacuated, the sliding of the movable electrode will be blocked, so that the filament cannot be pulled up in time after deformation, causing the filament to fall, and the experiment fails.

Images