Energy utilization in polysilicon hydrogenation process

A polysilicon and energy technology, applied in the direction of halogenated silicon compounds, silicon, etc., can solve the problem of waste of refrigerant and heating medium, and achieve the effect of reducing consumption, reducing operating cost and increasing temperature

Active Publication Date: 2012-10-17
巴彦淖尔聚光硅业有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In this process, the heat contained in the reaction gas is consumed by the co

Method used

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  • Energy utilization in polysilicon hydrogenation process
  • Energy utilization in polysilicon hydrogenation process
  • Energy utilization in polysilicon hydrogenation process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Example 1 A method for energy utilization in the polysilicon cold hydrogenation process, the process flow is as follows figure 2 As shown, it includes the following steps: (1) Silicon tetrachloride liquid and hydrogen gas enter the shell-and-tube vaporizer with a molar ratio of 1:3 and mix, control the pressure to 3.2MPa, and the temperature to 150°C, and then enter the quenching tube ;

[0033] (2) After the mixed gas of silicon tetrachloride and hydrogen entering the quenching tube exchanges heat with the reaction gas from the hydrogenation reactor, it enters the electric heater and is electrically heated to 600°C, and then enters the hydrogenation reactor and the silicon in it. The powder reacts;

[0034] (3) The reaction product gas from the hydrogenation reactor enters the quenching tube to exchange heat with the mixed gas of silicon tetrachloride and hydrogen, and then enters the Venturi scrubber. The washed silicon powder particles and a small amount of chloros...

Embodiment 2

[0039] Example 2 A method for energy utilization in the polysilicon cold hydrogenation process, the process flow is as follows figure 2 As shown, it includes the following steps: (1) Silicon tetrachloride liquid and hydrogen gas enter the shell-and-tube vaporizer with a molar ratio of 1:4, control the pressure at 2.0MPa, and the temperature at 160°C, and then enter the quenching tube ;

[0040] (2) After the mixed gas of silicon tetrachloride and hydrogen entering the quenching tube exchanges heat with the reaction gas from the hydrogenation reactor, it enters the electric heater and is electrically heated to 620°C, and then enters the hydrogenation reactor and the silicon in it. The powder reacts;

[0041] (3) The reaction product gas from the hydrogenation reactor enters the quenching tube to exchange heat with the mixed gas of silicon tetrachloride and hydrogen, and then enters the Venturi scrubber. The washed silicon powder particles and a small amount of chlorosilane re...

Embodiment 3

[0046] Embodiment 3 A method for energy utilization in the polysilicon cold hydrogenation process, which includes the following steps: (1) Silicon tetrachloride liquid and hydrogen gas are mixed in a tube-and-tube vaporizer at a molar ratio of 1:5, and the pressure is controlled to be 3.5MPa, the temperature is 140°C, and then enters the quenching tube;

[0047] (2) After the mixed gas of silicon tetrachloride and hydrogen entering the quenching tube exchanges heat with the reaction gas from the hydrogenation reactor, it enters the electric heater and is electrically heated to 580°C, and then enters the hydrogenation reactor and the silicon in it. The powder reacts;

[0048] (3) The reaction product gas from the hydrogenation reactor enters the quenching tube to exchange heat with the mixed gas of silicon tetrachloride and hydrogen, and then enters the Venturi scrubber. The washed silicon powder particles and a small amount of chlorosilane residue are regularly discharged to t...

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Abstract

The invention provides a method for utilizing energy in polysilicon cold-hydrogenation process, which improves the traditional cold-hydrogenation process and recycles the reaction heat to realize the effect of reducing the energy consumption. The method comprises the following steps: silicon tetrachloride liquid and hydrogen gas are introduced in a tubular vaporizer and mixed, and then enter a quenching pipe; the heat exchange is implemented for the mixed gas entering the quenching pipe and the reaction generated gas coming from a hydrogenation reactor; the mixed gas enters in an electric heater and is electrically heated, and then enters the hydrogenation reactor to react with silicon powders in the reactor; after the heat exchange of the reaction generated gas is implemented, the reaction generated gas enters a Venturi scrubber, and the silicon powder particles obtained by washing and a little chloro-silicane residual pulp are periodically discharged to a residual pulp tank; the gas which comes from the Venturi scrubber and is washed enters the tubular vaporizer; and the mixture of the hydrogen and the silicon tetrachloride after being heated enters a condensation system.

Description

technical field [0001] The invention relates to the utilization of heat energy in the cold hydrogenation process of polysilicon in the production process of polysilicon. Background technique [0002] Polysilicon preparation is an energy-intensive industry. At present, the polysilicon production process in China mainly adopts the improved Siemens method, which includes five main links: SiHCl3 synthesis, SiHCl3 rectification and purification, SiHCl3 hydrogen reduction, tail gas recovery and SiCl4 hydrogenation separate. The polysilicon prepared by this method has high purity and good safety, and its deposition rate and conversion efficiency are the highest, but the energy consumption is also high, and the energy consumption cost accounts for about 70% of the total cost. Therefore, how to improve the process and reduce the production cost has become the focus of each enterprise's sustainable development, and the utilization of waste heat in each process is the top priority. ...

Claims

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Application Information

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IPC IPC(8): C01B33/03C01B33/08
Inventor 齐林喜刘占卿郭金强王晓亮陈杰邢仕益
Owner 巴彦淖尔聚光硅业有限公司
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