Large-area contact type machining device for fused quartz by plasma discharge machining

A plasma and electrical discharge machining technology, used in manufacturing tools, glass manufacturing equipment, glass molding, etc., can solve the problems of low reactive ion activity, short processing time, high electrode temperature, and achieve high removal efficiency, good processing effect, The effect of reducing the electrode temperature
CN102730945AActive Publication Date: 2012-10-17HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
HARBIN INST OF TECH
Publication Date
2012-10-17

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Abstract

The invention discloses a large-area contact type machining device for fused quartz by plasma discharge machining, relates to a plasma machining device, and aims at solving the problems of the relatively low activity and low removal rate of reaction ions due to a high electrode temperature and a short machining time during the present plasma machining process. According to the invention, the upper end surface of an air guide plate and the upper end surface of a workpiece clamping plate on an end part are located in the same horizontal plane; a moulding electrode is arranged above a workpiece groove; a discharge space between two electrodes is formed on the lower end surface of the moulding electrode and the upper end surface of the workpiece groove; a cavity between an upper flow guide body and a lower flow guide body is a gas guide cavity; gas inlet holes are formed on the end surfaces of the gas inlet ends of the upper flow guide body and the lower flow guide body, and the two gas inlet holes are communicated with a gas mixing box; a helium gas cylinder, a carbon tetrafluoride gas cylinder and an oxygen cylinder are connected with the gas mixing box via a helium flow meter, a tetrafluoride flow meter and an oxygen flow meter respectively; a water pump is connected with a lower cooling channel and an upper cooling channel; and a radiofrequency power supply is connected with a high electrode and a base plate. The large-area contact type machining device disclosed by the invention is used for plasma machining.
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Description

technical field

[0001] The invention relates to a plasma processing device under atmospheric pressure, in particular to a device for large-area plasma processing of fused quartz through a radio frequency power supply. Background technique

[0002] Fused silica is an amorphous (glassy) state of silicon oxide and is a typical glass. It is mainly used in industries such as precision casting, glass ceramics, refractory materials and electronic appliances. With good uniformity and radiation resistance, it is widely used in high-energy laser windows, aerospace, microelectronics and other optical fields. Currently, large-area processing is less efficient due to the properties of fused silica combined with high demands on precision components. The processing methods for high-precision fused silica surfaces are divided into two categories, grinding and polishing. Grinding has high processing efficiency, but it usually causes damage to the surface and sub-surface metamorphic layers,...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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