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Trichlorosilane infrared transmission spectrum analysis sample preparation method and sample preparation sample reservoir thereof

A technology of trichlorosilane and infrared transmission, which is applied in the field of infrared spectrum analysis, can solve problems such as complex reaction systems, and achieve the effects of simple operation, easy processing, and cost reduction

Inactive Publication Date: 2013-02-13
SICHUAN UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the reaction system between silicon and HCl is more complicated, and SiH 2 Cl 2 、SiCl 4 by-product formation

Method used

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  • Trichlorosilane infrared transmission spectrum analysis sample preparation method and sample preparation sample reservoir thereof
  • Trichlorosilane infrared transmission spectrum analysis sample preparation method and sample preparation sample reservoir thereof

Examples

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Embodiment

[0029] In this example, the infrared spectrometer used is Nicolet 6700 from Thermo Electric Company of the United States; the vacuum glove box used is the ZKX vacuum glove box produced by Nanjing University Instrument Factory; Silicon samples.

[0030] In this embodiment, a thin copper sheet with a thickness of 0.1 mm is used as the U-shaped spacer 2. The two rigid plates 4 are stainless steel. Between the rigid plates 4, the fastening screw 1 is screwed and fixed through the screw holes on the two rigid plates 4 to prepare a sample preparation sample pool. Place the sample preparation sample cell and the trichlorosilane sample in a vacuum glove box, then seal the vacuum glove box door and evacuate it to 4×10 4 Pa, then slowly filled with nitrogen (N 2 ), until the air pressure in the vacuum glove box is balanced with the atmospheric pressure; through the operation window of the vacuum glove box, the trichlorosilane sample to be tested is dropped into the sample preparation ...

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Abstract

The invention relates to a trichlorosilane infrared transmission spectrum analysis sample preparation method and a sample preparation sample reservoir thereof and belongs to the field of material test. The method is that the trichlorosilane infrared transmission spectrum analysis sample preparation sample reservoir is designed, the sample reservoir is utilized to achieve the trichlorosilane infrared transmission spectrum analysis sample preparation method, and the infrared transmission spectrum analysis method is used to analyze and detect trichlorosilane. The sample reservoir comprises two rigid plates, a KBr chip, a U-shaped gasket, a fastening screw and a sample inlet, wherein the KBr chip, the U-shaped gasket, the fastening screw and the sample inlet are embedded in the middle of the sample reservoir. In sample preparation, the sample reservoir and trichlorosilane are arranged in a vacuum glove box, the vacuum glove box is vacuumized, then nitrogen is filled into to be balance with pressure, to-be-tested trichlorosilane liquid is dropped into the sample reservoir through an operation window of the vacuum glove box, the sample inlet of the sample reservoir is sealed through epoxy resin to finish sample preparation, and namely trichlorosilane can be analyzed and detected.

Description

technical field [0001] The invention relates to an infrared spectrum analysis technique, in particular to a trichlorosilane (SiHCl 3 ) Infrared transmission spectrum analysis sample preparation method and sample preparation sample cell, belonging to the field of material detection. Background technique [0002] Trichlorosilane (SiHCl 3 ) commonly known as chloroform, or trichlorosilane, the boiling point at normal pressure is 31.5 o C, volatile, will undergo violent hydrolysis reaction to form SiO when in contact with air or water 2 Precipitation and HCl, H 2 . [0003] Trichlorosilane is an important raw material for the manufacture of monocrystalline silicon and polycrystalline silicon, as well as an important intermediate for the synthesis of organic silicon. In recent years, with the development of solar photovoltaic industry and the rapid development of organic silicon industry, the demand for trichlorosilane is increasing day by day. [0004] In the synthesis of ...

Claims

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Application Information

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IPC IPC(8): G01N1/28G01N21/01
Inventor 陈强丁国江胡乐沙肖定全朱建国
Owner SICHUAN UNIV
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