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A kind of solar cell sheet and diffusion method thereof

A technology of a solar cell and a diffusion method, applied in the field of solar cells, can solve problems such as low conversion efficiency of solar cells, and achieve the effects of enhancing short-wave response and improving conversion efficiency

Active Publication Date: 2016-06-29
HAINAN YINGLI NEW ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the prior art, the conversion efficiency of solar cells formed by the above process is low

Method used

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  • A kind of solar cell sheet and diffusion method thereof
  • A kind of solar cell sheet and diffusion method thereof
  • A kind of solar cell sheet and diffusion method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Step S101, such as figure 2 As shown, a semiconductor substrate 201 is provided.

[0051] The semiconductor substrate 201 provides a working platform for the realization of the subsequent diffusion method, and the material of the semiconductor substrate shown can be a single crystal material or a polycrystalline material. The doping type of the semiconductor substrate can be N-type doping or P-type doping.

[0052] Step S102, such as image 3 As shown, under the first temperature condition, an impurity layer 202 is formed on the surface of the semiconductor substrate 201 to be diffused;

[0053] The impurity is introduced in the way of low-temperature source, that is, the temperature is low when the impurity is introduced. Due to the low activity of impurities under low temperature conditions, the impurities are evenly distributed on the surface of the semiconductor substrate, and most of the impurities are only deposited on the surface of the semiconductor substrat...

Embodiment 2

[0064] Corresponding to the diffusion method provided in Embodiment 1 of the present invention, Embodiment 2 of the present invention provides a solar battery sheet. Combine below Figure 6 The structure of the solar cell sheet will be described in detail.

[0065] The solar cell includes:

[0066] semiconductor substrate 601;

[0067] It should be noted that the semiconductor substrate material in this embodiment can be single crystal or polycrystalline; the doping type of the semiconductor substrate can be N-type doping or P-type doping. This is not limited.

[0068] a shallow junction 602 formed in the semiconductor substrate 601;

[0069] The doping type of the shallow junction 602 is opposite to that of the semiconductor substrate 601 , so as to form a PN junction in the semiconductor substrate 601 . Due to the adsorption of impurities by the oxide layer 603, the diffusion of impurities into the semiconductor substrate is hindered to a certain extent, so that the PN ...

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Abstract

The invention discloses a solar cell and a diffusion method thereof. The diffusion method includes providing a semiconductor substrate; forming an impurity layer on a surface of the semiconductor substrate under the condition of a first temperature, wherein the surface of the semiconductor substrate is to be diffused; subjecting one side of the impurity layer formed on the surface of the semiconductor substrate to oxidation under the condition of a second temperature by means of a wet oxidation process to form an oxidation layer on the surface of the semiconductor substrate; and subjecting the semiconductor substrate which is subjected to oxidation to heat preservation under the condition of the second temperature, wherein the first temperature is smaller than the second temperature. By means of the diffusion method of the solar cell, concentration of impurities on the surface of the semiconductor substrate can be reduced, and simultaneously, evenly distributed shallow junctions can be formed in the semiconductor substrate so that conversion efficiencies of the solar cell are improved from two aspects.

Description

technical field [0001] The invention relates to the field of solar cells, in particular to a solar cell sheet and a diffusion method thereof. Background technique [0002] The current solar cell market is dominated by crystalline silicon solar cells, and the development trend is to further increase the conversion efficiency of solar cells while reducing production costs. At present, improving the conversion efficiency of solar cells is mainly achieved through two aspects: one is to uniform the impurity concentration on the surface of solar cells; the other is to reduce the PN junction depth of solar cells. In the production process of solar cells, the impurity concentration on the surface of solar cells and the PN junction depth of solar cells mainly depend on the diffusion process steps. [0003] The traditional diffusion process used in the production process of solar cells is generally dry oxidation diffusion under constant temperature conditions, which mainly includes t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/22H01L31/0352
Inventor 王路苏亚立吴卫平曾德栋彭丽霞王家道朱志文
Owner HAINAN YINGLI NEW ENERGY