Silicon-based multi-junction tandem solar cell with flexible substrate and interlayer
A technology of solar cells and flexible substrates, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as limiting battery efficiency, no explanation or report found, wide band gap, etc., and achieve improved short-circuit current density and photoelectric conversion efficiency High and stable effect
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[0023] Example Double-junction stack cell
[0024] A double-junction stack cell was fabricated on a polyimide substrate with a thickness of 75 μm according to the following steps:
[0025] In step 1, the Ag / ZnO back reflection electrode 12 is deposited on the polyimide substrate 11 by magnetron sputtering.
[0026] Step 2, using the plasma chemical vapor deposition (PECVD) method to deposit an amorphous silicon germanium bottom cell 13 with a NIP structure, wherein the reaction gas of the N layer of amorphous silicon is hydrogen, silane and phosphine, and the thickness is 10nm~50nm. The reaction gas of the crystalline silicon germanium layer is hydrogen, silane and germane, with a thickness of 150nm~400nm, and the reaction gas of the P layer nano silicon is hydrogen and silane, with a thickness of 10nm~50nm.
[0027] In step 3, the bottom battery 13 is taken out from the vacuum equipment, and placed in a dry cabinet (humidity lower than 30%) at room temperature for about 24 h...
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