Atmospheric pressure induced air dielectric barrier discharge (DBD) low temperature plasma generation device

A low-temperature plasma and air medium technology, applied in the direction of plasma, electrical components, etc., can solve the problems of high plasma airflow temperature, low surface treatment efficiency, difficult industrial application, etc., and achieve the effect of reducing electric field strength

Active Publication Date: 2013-02-27
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0007] The present invention aims to provide an atmospheric pressure-induced air dielectric barrier discharge low-temperature plasma generator to solve the problem of high temperature, small vol

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  • Atmospheric pressure induced air dielectric barrier discharge (DBD) low temperature plasma generation device
  • Atmospheric pressure induced air dielectric barrier discharge (DBD) low temperature plasma generation device
  • Atmospheric pressure induced air dielectric barrier discharge (DBD) low temperature plasma generation device

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Embodiment Construction

[0034]The atmospheric-pressure low-temperature plasma generating device provided by the present invention is composed of a discharge unit with a dielectric barrier discharge electrode structure, a slit cavity and a power supply device. The discharge unit includes two plate electrodes, namely a high-voltage electrode and a ground electrode. The electrodes are made of heat-resistant metal materials, such as aluminum, copper, tungsten, nickel, tantalum, platinum and alloys of these metals, but not limited to the above materials; It also includes an insulating dielectric layer (flat plate) covering the surface of the high-voltage electrode. The insulating dielectric layer can limit the magnitude of the discharge current between the two electrodes and prevent the glow-like discharge from turning into an arc or spark discharge. The insulating medium layer is made of insulating materials such as fiber, plastic, rubber, mica, glass, ceramics or polytetrafluoroethylene. The slit cavity...

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Abstract

The invention aims to provide an atmospheric pressure induced air dielectric barrier discharge (DBD) low temperature plasma generation device. The device comprises a discharge unit provided with a DBD electrode structure and a narrow slit cavity body connected to the front end of the discharge unit, wherein the discharge unit comprises two oppositely-arranged plate electrodes; an insulation medium plate used for limiting a discharge current between the two plate electrodes is fixedly arranged on the plane of the inner side of a high voltage electrode; a sample to be processed, which is plate-shaped, is movably mounted on the plane of the inner side of a grounding electrode in a manner of being parallel and opposite to the insulation medium plate; the narrow slit cavity body is provided with a gas inlet port used for connecting induced gas into the narrow slit cavity body, and a narrow-slit-shaped gas outlet port; and the gas outlet port is embedded between the insulation medium plate and the sample to be processed. The plasma generation device provided by the invention can produce evenly-dispersed plasma; and the plasma is rich in active species such as metastable-state nitrogen molecules, hydroxyl radicals and oxygen atoms, and can be used for conducting material surface modification, sterilization, disinfection, and the like.

Description

technical field [0001] The invention relates to a low-temperature plasma generating device, which can be applied to large-area material surface modification and sterilization. Background technique [0002] In recent years, plasma technology (plasma treatment process) has been widely used in industrial fields such as semiconductor manufacturing, surface cleaning and improvement of material materials, and sterilization. The successful application of plasma technology in the above-mentioned many industrial fields is due to the non-equilibrium characteristics of plasma. In the non-equilibrium plasma system, there are a large number of low-temperature chemically active species. When these active species are in contact with the surface of other substances, they can improve the surface properties of the substances without affecting the overall properties of these substances. [0003] In the traditional industrial field, low-pressure glow discharge non-equilibrium plasma is mainly ...

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Application Information

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IPC IPC(8): H05H1/24
Inventor 汤洁段忆翔赵卫王屹山姜炜曼李世博
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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