Atmospheric pressure induced air dielectric barrier discharge (DBD) low temperature plasma generation device

Abstract

The invention aims to provide an atmospheric pressure induced air dielectric barrier discharge (DBD) low temperature plasma generation device. The device comprises a discharge unit provided with a DBD electrode structure and a narrow slit cavity body connected to the front end of the discharge unit, wherein the discharge unit comprises two oppositely-arranged plate electrodes; an insulation medium plate used for limiting a discharge current between the two plate electrodes is fixedly arranged on the plane of the inner side of a high voltage electrode; a sample to be processed, which is plate-shaped, is movably mounted on the plane of the inner side of a grounding electrode in a manner of being parallel and opposite to the insulation medium plate; the narrow slit cavity body is provided with a gas inlet port used for connecting induced gas into the narrow slit cavity body, and a narrow-slit-shaped gas outlet port; and the gas outlet port is embedded between the insulation medium plate and the sample to be processed. The plasma generation device provided by the invention can produce evenly-dispersed plasma; and the plasma is rich in active species such as metastable-state nitrogen molecules, hydroxyl radicals and oxygen atoms, and can be used for conducting material surface modification, sterilization, disinfection, and the like.

Description

technical field [0001] The invention relates to a low-temperature plasma generating device, which can be applied to large-area material surface modification and sterilization. Background technique [0002] In recent years, plasma technology (plasma treatment process) has been widely used in industrial fields such as semiconductor manufacturing, surface cleaning and improvement of material materials, and sterilization. The successful application of plasma technology in the above-mentioned many industrial fields is due to the non-equilibrium characteristics of plasma. In the non-equilibrium plasma system, there are a large number of low-temperature chemically active species. When these active species are in contact with the surface of other substances, they can improve the surface properties of the substances without affecting the overall properties of these substances. [0003] In the traditional industrial field, low-pressure glow discharge non-equilibrium plasma is mainly ...

AI Technical Summary

Problems solved by technology

[0007] The present invention aims to provide an atmospheric pressure-induced air dielectric barrier discharge low-temperature plasma generator to solve the problem of high temperature, small volume and low surface treatment efficiency of the plasma flow generated by the atmospheric pressure plasma generator in the prior art. lead to problems that are difficult to apply in real industry

Images