Method for washing high-resistivity and low-resistivity silicon materials
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A silicon material and material resistance technology, which is applied in the field of solar silicon industry cleaning and treatment, can solve the problems of unfavorable output, unfavorable, uncertain human factors, etc., and achieve the effect of reducing production cost, simple operation and improving economic benefits.
Inactive Publication Date: 2013-03-27
嘉兴嘉晶电子有限公司
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[0002] The traditional processing method is to manually test the resistivity to achieve the purpose of sorting (such as multimeter, electric pen, etc.). For the silicon material that is too small to be processed by the traditional method, it is not only time-consuming, the output cannot be increased, but there are also human factors. Uncertainty, resulting in the failure to fully select the low resistance, which is not good for the materials used in the next production
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Embodiment 1
[0016] The silicon material cleaning method that contains high and low resistance at the same time described in this embodiment, its steps are as follows: configuration concentration is greater than 40% hydrofluoric acid solution or concentration is greater than 40% hydrofluoric acid: the weight ratio of ammonium fluoride is 6~10: 1 Put the mixed solution in the acid bubble pool, put the waste silicon material into it, and soak for 48 hours. During this process, the oxide layer on the silicon surface can be completely removed; take it out and wash it with water to neutral, configure aqua regia in another acid bubble pool, put the silicon material into aqua regia, and soak for 24 hours. This process can completely remove the waste silicon material and the metal contamination on its surface; take it out and wash it with water to neutral, and configure a 6-10:1 49±1% hydrofluoric acid: 68±2% nitric acid mixed solution in the transfer box, Put the silicon material into a plastic b...
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Abstract
The invention discloses a method for washing high-resistivity and low-resistivity silicon materials. The method comprises the following steps of: soaking the silicon material into hydrofluoric acid or a mixed solution of hydrofluoric acid and ammonium fluoride, after soaking, taking out the silicon material and washing the silicon material to be neutral with water; preparing the mixed solution of hydrofluoric acid and hydrogen nitrate, adding the silicon material into a plastic container, adding the prepared mixed solution, after reaction, lightly swashing the silicon material with clean water, enabling the low-resistivity silicon material to float on water surface, thereby realizing separation of high-resistivity silicon material and low-resistivity silicon material; mixing the mixed solution of hydrofluoric acid, hydrogen nitrate and glacial acetic acid, adding the separated high-resistivity material into the mixed solution, stirring and adding hydrogen peroxide at intervals, then, taking out the material and washing the material to be neutral with water; adding the high-resistivity material into an alkali wash basin, adding solid sodium hydroxide, adding a sodium hydroxide solution simultaneously, stirring for reaction, then, washing the alkali liquor away by the clean water; soaking the high-resistivity material into electronic grade hydrochloric acid, after soaking, washing the high-resistivity material to be clean with pure water; and finally, executing ultrasonic treatment with pure water, and then, fishing out the high-resistivity material, and drying.
Description
technical field [0001] The invention relates to the technical field of solar silicon industry cleaning and processing, in particular to a method for cleaning silicon materials containing both high and low resistance. Background technique [0002] The traditional processing method is to manually test the resistivity to achieve the purpose of sorting (such as multimeter, electric pen, etc.). For the silicon material that is too small to be processed by the traditional method, it is not only time-consuming, the output cannot be increased, but there are also human factors. Uncertainty leads to the failure to fully select low resistance, which is not good for the materials used in subsequent production. Contents of the invention [0003] The object of the present invention is to provide a method for cleaning silicon materials containing high and low resistance while effectively removing the low resistance materials in the small-sized high and low resistance mixed silicon materi...
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