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A chip-integrated silicon oxide microsphere laser

A technology of silicon oxide microspheres and lasers, which is applied in the field of micro-optical devices, can solve the problems of low threshold and inability to realize chip integration, and achieve the effect of low threshold

Active Publication Date: 2014-10-15
NANJING UNIV
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  • Abstract
  • Description
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Problems solved by technology

At the same time, microsphere lasers prepared by direct fusion of microfibers have also been prepared, and have a lower threshold, but chip integration cannot be achieved.

Method used

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  • A chip-integrated silicon oxide microsphere laser
  • A chip-integrated silicon oxide microsphere laser
  • A chip-integrated silicon oxide microsphere laser

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preparation example Construction

[0023] The preparation process of silicon oxide microsphere laser of the present invention is as follows:

[0024] (1) First prepare a silicon oxide film by sol-gel method, in which rare earth impurities are mixed, and the thickness of the film is 1 μm to 2 μm; (2) After photolithography, wet etching and dry etching, silicon oxide microdisks are obtained; (3) Use a carbon dioxide laser to heat and reflow the silica microdisk to melt the silica microdisk into microspheres; (4) Draw a single-mode fiber with a diameter of 125um into a microfiber with a diameter of about 1μm by high temperature stretching method, and Control the loss below 5%; (4) place the microfiber close to the microsphere resonator to ensure the best coupling between the two; (5) input the pump light from port A to the microsphere resonator 2, and Gradually increase the pump power. When the pump power exceeds the threshold, laser light will be output from port B. Continue to increase the pump light to get diff...

Embodiment 1

[0026] Silicon oxide film was prepared by sol-gel method, and doped impurity concentration was 2×10 19 cm -3 Erbium ions with a film thickness of 1.3 μm. After photolithography, wet etching and dry etching, a silicon oxide microdisk is obtained. The silicon oxide microspheres are obtained by heating and reflowing the silicon oxide microdisks by using a carbon dioxide laser. On the other hand, a micro-fiber with a diameter of 1 μm to 2 μm is prepared by using a high-temperature stretching method for an ordinary single-mode fiber. Then put the silicon oxide microspheres on the three-dimensional piezoelectric console, precisely control their position, and slowly bring the two closer together. Bring the two together, find the best coupling point, and input continuous pump light with a wavelength of about 1480nm, and continuously increase the pump power to excite rare earth ions to generate fluorescence. When the gain of rare earth ions is greater than the loss in the cavity, th...

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Abstract

The invention discloses a chip-integrated silicon oxide microsphere laser, which comprises a rare earth-doped silicon oxide microsphere and a micro-fiber, the micro-fiber is located on one side of the silicon oxide microsphere, and the silicon oxide microsphere passes through the following The method prepares: (1) preparing a silicon oxide film doped with rare earth impurities on the surface of a silicon wafer by a sol-gel method; (2) preparing a silicon oxide microdisk on the surface of the silicon oxide film by photolithography and etching; ( 3) Using a carbon dioxide laser to heat and reflow the silicon oxide microdisk to obtain silicon oxide microspheres. The silicon oxide microsphere laser prepared by the sol-gel rare earth doping method of the present invention has the characteristics of miniaturization, low threshold value, stability, chip integration and the like.

Description

technical field [0001] The invention belongs to the field of micro-optical devices, and in particular relates to a silicon oxide microsphere laser prepared by a sol-gel rare earth doping method. Background technique [0002] Microlaser is a very important optical and electronic component, which has broad application prospects in optical information processing, optical integrated circuits, and chemical and biological sensing. With the improvement of the optical fiber preparation process, low-loss micro-nano optical fiber has been prepared, and the coupling of the evanescent wave of the micro-nano optical fiber with photonic devices has been proved to be the most effective. Nowadays, the integration process is very mature, and silicon oxide microdisk resonators and microring core resonators can be well prepared. Therefore, the preparation of lasers by coupling micro-nano fibers with micro-disks and micro-ring cores has become a very popular research subject. At the same time...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/16H01S3/091
Inventor 姜校顺范会博华士跃肖敏
Owner NANJING UNIV
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