Laser interferometer optical path difference location method and system
A technology of laser interferometer and positioning method, which is applied in the direction of spectrometry/spectrophotometry/monochromator, radiation pyrometry, instruments, etc., which can solve the problem of poor high-precision sampling, the inability to achieve equal optical paths, and inappropriate Conventional instrumentation and other issues to achieve the effect of high measurement accuracy
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[0026] In order to clearly illustrate the technical features of the solution, the solution will be described below through a specific implementation manner.
[0027]As shown in the attached figure, a laser interferometer optical path difference positioning method, the collimated beam from the laser shoots to the cube beam splitter, the reflected light reflected by the cube beam splitter shoots to the fixed mirror, and returns to the fixed mirror after being vertically reflected by the fixed mirror. The cube beam splitter; the collimated beam passes through the cube beam splitter and the part of the light beam is directed to the moving large pyramid retroreflector and then is retroreflected to the fixed small pyramid retroreflector; the small pyramid retroreflector is retroreflected After being retroreflected by the reflector, it shoots to the moving large pyramid retroreflector again; then it is reflected by the large pyramid retroreflector to the fixed plane reflector again; f...
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