Method for obtaining ultrahigh vacuum in vacuum electron beam welding of niobium materials
A vacuum electron beam and ultra-high vacuum technology, applied in electron beam welding equipment, welding equipment, manufacturing tools, etc., can solve problems such as niobium material pollution
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Embodiment 1
[0022] (1) Take niobium plate A with a purity of 99.99% as the sacrificial metal, and the size of the niobium plate is 60mm×150mm×40mm. The niobium plate is pickled with hydrofluoric acid (concentration 40%), nitric acid (concentration 65%), phosphoric acid (concentration 85%) (volume ratio 1:1:2), and the temperature of the acid is controlled below 20°C for 20 minute. Then rinse with pure water greater than 10MΩ·cm for 30 minutes, and then dry it in a class 100 ultra-clean room for 2 hours.
[0023] (2) Put the niobium plate A and the niobium workpiece into the vacuum chamber of the electron beam welding machine to evacuate. Vacuum up to 7.4×10 -4 At Pa, start the electron beam with a power of 0.5Kw, the surface focus, the oscillation pattern of the electron beam is circular, the oscillation frequency is 1000 Hz, and the diameter of the oscillation circle is 5.0mm.
[0024] (3) The moving speed of molten pool is 0.2mm / sec. The trajectory of the molten pool movement is a s...
Embodiment 2
[0028] (1) Take tantalum plate B with a purity of 99.95% as the sacrificial metal, and the size of the tantalum plate is 150mm×650mm×25mm. The tantalum plate is pickled with a mixed acid of hydrofluoric acid, nitric acid, and sulfuric acid (volume ratio of 2:2:5) for 4 minutes. Then rinse with pure water greater than 10MΩ·cm for 30 minutes, and then dry it in a class 100 ultra-clean room for 2 hours.
[0029] (2) Put the tantalum plate B and the niobium workpiece into the vacuum chamber of the electron beam welding machine to evacuate. Vacuum up to 3.6×10 -3 At Pa, start the electron beam with a power of 15Kw, the lower focus, the oscillation pattern of the electron beam is circular, the oscillation frequency is 1000 Hz, and the diameter of the oscillation circle is 4.5mm.
[0030] (3) The moving speed of molten pool is 50mm / sec. The trajectory of the molten pool movement is a straight line back and forth, and the lateral deviation is 10mm each time the direction is changed...
Embodiment 3
[0034] (1) A titanium plate C with a purity of 99.95% is used as the sacrificial metal, and the size of the titanium plate is 200mm×580mm×30mm. The titanium plate was pickled with a mixed acid of hydrofluoric acid and nitric acid (1:5 molar ratio) for 2 minutes. Then rinse with pure water greater than 10MΩ·cm for 30 minutes, and then dry it in a class 100 ultra-clean room for 2 hours.
[0035] (2) Put the titanium plate C and the niobium workpiece into the vacuum chamber of the electron beam welding machine to evacuate. Vacuum up to 5.3×10 -3 At Pa, start the electron beam with a power of 1.3Kw, the upper focus, the oscillation pattern of the electron beam is a circle, the oscillation frequency is 1000 Hz, and the diameter of the oscillation circle is 2.5mm.
[0036] (3) The moving speed of molten pool is 25mm / sec. The trajectory of the molten pool movement is a straight line back and forth, and the lateral deviation is 10mm each time the direction is changed. The electron...
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