Thin film transistor, manufacturing method thereof, array substrate and display device
A technology of thin film transistors and substrates, which is applied in the direction of transistors, semiconductor/solid-state device manufacturing, and electric solid-state devices. It can solve the problems of reducing the performance of Oxide TFT, not simple enough structure, and complicated process flow, and achieve simplified TFT structure, good electrical performance, The effect of simplifying the manufacturing process
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0061] The embodiment of the present invention provides a thin film transistor and a manufacturing method thereof, an array substrate and a display device, so as to provide a TFT with a simple structure and better performance.
[0062] The embodiment of the present invention simplifies the structure of the TFT by fabricating the source, drain, and gate of the TFT in the same layer. The process of fabricating the TFT adopts the 5Mask process, which simplifies the TFT fabrication process. The active layer is provided with a first contact layer connected to the source and a second contact layer connected to the drain to avoid the generation of non-channel high-resistance regions, and to avoid the gate and source or gate and drain The formation of parasitic capacitance between them ensures the good electrical performance of the TFT.
[0063] The TFT provided by the embodiment of the present invention will be described in detail below with reference to the accompanying drawings.
[0064]...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2023 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap