The invention provides a fin type
field effect transistor and a manufacture method of the fin type
field effect transistor. The method comprises the steps that a fin is formed on a
semiconductor substrate, a virtual grid
electrode is formed on the
semiconductor substrate with the formed fin and stretches across the fin, first side walls are formed on two sides of the virtual grid
electrode, ions are implanted in the fin so as to form a source
electrode and a drain electrode of the fin type
field effect transistor, the virtual grid electrode is eliminated, an opening is formed in the position of the virtual grid electrode, a high-K-grid medium layer and a
metal grid
electrode material layer are sequentially deposited so as to fill the opening, and a
metal grid electrode is formed, and the first side walls and the high-K-grid medium layer on the side wall of the
metal grid electrode are eliminated. According to the fin type
field effect transistor, the high-K-grid medium layer on two sides of the
metal grid electrode are effectively eliminated in sequence, stray
capacitance is prevented from generating between the
metal grid electrode and the source electrode or the drain electrode, other
semiconductor structures are prevented from being damaged during the eliminating process, and the fin type
field effect transistor is enabled to be good in electrical properties.