Photomask with novel three-layer-film structure, and preparation method thereof
A technology of three-layer film and photomask, which is applied in the fields of chemical instruments and methods, photoplate making process of patterned surface, optics, etc., can solve the problem of inability to ensure etching time, etch rate, product storage period, and sodium ion precipitation Aggravation and other problems, to achieve the effect of clear etching lines, stable etching speed and good uniformity
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[0036] Example 1
[0037] Such as figure 1 The photomask of the most preferred new three-layer film structure shown in the present invention includes a glass substrate 1, a chromium carbonitride barrier layer 11, a chromium carbonitride light-shielding film layer 12, and a chromium carbonitride antireflection film Layer 13, the chromium carbonitride barrier layer 11, the chromium carbonitride light-shielding film layer 12, and the chromium carbonitride antireflection film layer 13 are sequentially plated on the glass substrate. The glass substrate 1 may be a soda lime glass substrate, a quartz glass substrate, a borosilicate glass substrate or a crown glass substrate. The thickness of the chromium oxynitride barrier layer 11 is The thickness of the chromium carbonitride light-shielding film 12 is The thickness of the chromium oxynitride anti-reflection film 13 is
[0038] Prepare the photomask with the most preferred new three-layer film structure of the present invention accor...
Example Embodiment
[0046] Example 2
[0047] Four different substrate glasses (soda lime glass, quartz glass, borosilicate glass, white crown glass) were used to prepare 4 samples of the most preferred new three-layer film structure of the present invention, and the preparation method was carried out according to Example 1.
[0048] Put the above-mentioned coated sample glass into a clean oven, raise the temperature to 160°C and keep it for 1 hour, and then cool to room temperature naturally. Then put the above samples into the following etching solution and soak for 15s (700g cerium ammonium nitrate + 150ml, 98% glacial acetic acid + 3500ml pure water), and then use a microscope to observe the pinholes of the etched samples one by one using a 500x lens Happening.
[0049] The pinhole observation results are: 20 soda lime glass, 0 quartz glass, 1 borosilicate glass, and 5 crown white glass.
[0050] This example shows that the barrier layer of the present invention has different barrier effects on subs...
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