Method for directly preparing graphene on insulation base
An insulating substrate, graphene technology, applied in the direction of graphene, nano carbon, etc., can solve the problems of affecting performance and damage, and achieve the effect of avoiding damage and simple operation.
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Embodiment 1
[0022] 1) Pre-treatment: Use a silicon wafer (3cm*3cm) with a 300nm silicon dioxide layer as the insulating substrate (1), clean it with absolute ethanol, acetone, and deionized water for 20 minutes, and dry it with nitrogen; Nickel foil (2cm*2cm) with a purity of 10 microns and a purity of 99wt% is used as the metal catalyst layer (3) to be ultrasonically cleaned with acetone, isopropanol, and deionized water for 20 minutes in sequence, and dried with nitrogen;
[0023] 2) After the treatment in step 1), the silicon wafer insulating substrate (1) with silicon dioxide can be selected from various carbon polymer layers, and a layer of carbon-containing polymer (2) can be spin-coated on the silicon dioxide side , typically: one or more combinations of polymethyl methacrylate (PMMA), polydimethylsiloxane (PDMS), polyethylene (PE), polypropylene (PP); The material layer (2) can be a corresponding solvent; the above-mentioned typical carbon polymer layer is sequentially selected fr...
Embodiment 2
[0030] 1) Pretreatment: Use a quartz sheet (3cm*3cm) as the insulating substrate (1), ultrasonically clean it with absolute ethanol, acetone, and deionized water for 20 minutes, and dry it with nitrogen; For the metal catalyst layer (3), select the copper foil (2cm*2cm) and ultrasonically clean it with acetone, isopropanol, and deionized water for 20 minutes in sequence, and dry it with nitrogen.
[0031] 2) Spin-coat a layer of carbon-containing polymer (2) PMMA (2000rpm, 60 seconds) on the quartz wafer treated in step 1); the solvent of the PMMA solution used is chlorobenzene, and the concentration is 40mg / ml; The copper foil of the obtained metal catalyst layer (3) is attached to the PMMA layer, and a certain pressure is applied to make them in close contact, and then the combination of the three is placed in an environment of 170 degrees for 1 minute to evaporate the solvent and make the combination firm.
[0032] 3) Place the combination obtained in step 2) in a CVD (Chem...
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