TFT-LCD (thin film transistor-liquid crystal display) array panel structure and production method thereof

Abstract

The invention provides a TFT-LCD (thin film transistor-liquid crystal display) array panel structure and a production method thereof. An anti-ESD (anti-electrostatic discharge) element of which a gate metal layer is in direct contact with a source/drain metal layer is produced outside a TFT array in order to prevent each process station after source/drain metal deposition from being injured by static electricity, so that the product percent of pass can be increased; meanwhile, by correspondingly changing active mask, silicon islands are formed in the process of via-hole mask, consequently, the process steps are simplified, and the production cost is reduced; meanwhile, by correspondingly changing gate mask, active mask and source/drain mask, the gate metal is covered by the source/drain metal in the area of a VT/FPC/IC pad, consequently, the electrode corrosion of the gate metal layer can be reduced, and in the extending area of a fanout line, the line resistance can be decreased; and furthermore, before the deposition of the gate metal layer, a silicon nitride layer is first formed, so that the injuries of a substrate caused by dry etch can be reduced.

Description

technical field [0001] The invention relates to the technical field of TFT-LCD manufacturing, in particular to a TFT-LCD array panel structure and a manufacturing method thereof. Background technique [0002] TFT-LCD (Thin film transistor liquid crystal display, Thin film transistor liquid crystal display) is a kind of liquid crystal display, which uses thin film transistor technology to improve image quality, and is widely used in TVs, flat panel displays and projectors. [0003] TFT-LCD is composed of three core components: display screen, backlight source and driving circuit. Simply put, a TFT-LCD display can be regarded as a layer of liquid crystal sandwiched between two glass substrates. The upper glass substrate has a color filter film (Color Filter), while the lower glass is embedded with TFT transistors. Polarizers are pasted on the outer sides of the upper and lower glass substrates respectively. When the current passes through the transistor, the electric field c...

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Problems solved by technology

[0007] During the manufacturing process of the above-mentioned TFT-LCD array panel 5mask, processes such as transmission, cleaning, and stripping will cause a large amount of electrostatic charge to accumulate on the surface of the glass substrate, between the gate and the source / drain, and between the source / drain and the pixel electrode. When the voltage difference between them is too large, a discharge phenomenon will occur, which is generally called an ESD phenomenon. The ESD phenomenon will cause a source-gate short circuit (DGS), a source and common electrode line short circuit (DCS), and a short circuit between data lines ( DDS), gate open circuit, data line short circuit and other electrostatic damage, resulting in various forms of line defects (Line defect) that cannot be repaired by subsequent processes, seriously reducing product yield and production costs

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