System and method for aerating and plugging alkali metal steam chamber of mini type CPT atomic clock

An alkali metal, steam cavity technology, applied in metal material coating technology, microstructure technology, gaseous chemical plating and other directions, can solve the problems of frequency drift, high environmental requirements, difficult to batch production, etc. The effect of reducing production costs

Active Publication Date: 2013-10-09
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] Aiming at the problems of high environmental requirements, frequency drift caused by the introduction of impurities, complicated operation, and difficulty in mass production in the current manufacturing method of the atomic clock alkali metal steam chamber, the present invention proposes a method for inflating and sealing the miniature CPT atomic clock alkali metal vapor chamber. and system, enabling the manufacture of atomic clock alkali metal vapor chambers to overcome the above-mentioned problems

Method used

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  • System and method for aerating and plugging alkali metal steam chamber of mini type CPT atomic clock
  • System and method for aerating and plugging alkali metal steam chamber of mini type CPT atomic clock
  • System and method for aerating and plugging alkali metal steam chamber of mini type CPT atomic clock

Examples

Experimental program
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Effect test

Embodiment 1

[0052] as attached Figure 2a-2b Shown, wherein 2a is a top view of 2b. The atomic clock alkali metal vapor chamber adopts Si-Glass two-layer anode bonding structure. The lower layer is a silicon wafer, which uses ordinary N-type double-sided precision polished silicon wafers. The upper layer is a glass wafer, which uses Pyrex7740 glass. Inflatable holes 23 on the glass. First, use wet etching on the semiconductor silicon material to make the upper silicon ventilation groove 21 and the upper silicon alkali metal vapor chamber 22, and then use mechanical drilling or laser drilling on the glass material to make gas on the glass with alkali metal vapor Hole 23, make a thin layer of SiO on the corresponding silicon vent groove directly below the gas filling hole 2 Layer 26, and finally carry out Si-Glass anode bonding to make the alkali metal vapor cavity of the miniature CPT atomic clock to be inflated and sealed.

[0053] Then put the disc of the miniature CPT atomic clock a...

Embodiment 2

[0056] The disc of the miniature CPT atomic alkali metal vapor chamber is put into the inflation and sealing system, which is the same as in Example 1. The difference is that in this embodiment, the atomic alkali metal vapor chamber adopts a Si-Glass two-layer anode bonding structure, and the lower layer It is a silicon wafer, using ordinary N-type double-sided precision polished silicon wafer, the upper layer is a glass sheet, using Pyrex 7740 glass, and the air-filling and sealing channel is the micro-inflation channel 24 on the glass, as attached Figure 3a-3b Shown, wherein 3a is a top view of 3b. Firstly, on the semiconductor silicon material, wet etching is used to fabricate the upper-silicon vent groove 21 and the upper-silicon alkali metal vapor chamber 22, and then on the glass material, mechanically or laser-drilled holes are used to make corresponding holes directly above the silicon vent groove. The air-filled hole 23 on the glass that produces the alkali metal va...

Embodiment 3

[0058] The disc of the miniature CPT atomic alkali metal vapor chamber is put into the inflation and sealing system is the same as that of Example 1, the difference is that in this embodiment, the atomic alkali metal vapor chamber adopts a Glass-Si-Glass three-layer anode bonding structure , the middle layer is a silicon wafer, using N-type double-sided precision polished silicon wafers, the upper and lower layers are glass wafers, using Pyrex 7740 glass, and the air-filling and sealing channel is the air-filling hole 23 on the glass, as attached Figure 4a-4b Shown, wherein 4a is a top view of 4b. First, use wet etching on the semiconductor silicon material to make the silicon vent groove 21 and the silicon alkali metal vapor chamber 22 that is etched through, and then carry out anodic bonding of the glass and the back of the silicon wafer, and then use mechanical etching on the glass material. Holes or laser drilling and other methods are used to make air-filled holes 23 on...

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Abstract

The invention relates to a system and a method for aerating and plugging an alkali metal steam chamber of a mini type CPT atomic clock. The system mainly comprises a buffer gas storing bottle, an alkali metal steam gas storing bottle, a vacuum chamber, an MEMS (micro-electromechanical systems) wafer supporting table, a vacuum pump and a laser plugging device. A manufacture method of an MEMS wafer of the alkali metal steam chamber comprises the following steps of: manufacturing an on-silicon alkali metal steam chamber on a silicon wafer, simultaneously forming an in-silicon vent groove in the silicon wafer by means of dry etching or wet etching, forming in-glass aerating holes in a glass material by means of mechanical holing or laser holing and the like, manufacturing on-glass aerating micro-channels on the glass material by means of the wet etching, and manufacturing the alkali metal steam chamber of the mini type CPT atomic clock by means of anodic bonding. The CO2 laser beam penetrates through an optical window of a vacuum chamber to melt alkali metal steam chamber chips on the MEMS wafer one by one to plug the glass aerating holes or aerating micro-channels. According to the system and the method provided by the invention, the alkali metal steam chamber of the mini type CPT atomic clock has the advantages that the alkali metal steam chamber is simply operated, impurities are hardly introduced, the alkali metal steam chamber is conveniently manufactured in batches, and the like.

Description

technical field [0001] The invention relates to the field of miniature CPT atomic clocks, in particular to a method and system for filling and sealing an alkali metal steam chamber of a miniature CPT atomic clock. Background technique [0002] Atomic clocks are currently the most accurate timekeeping tools, and play an important role in astronomy, aerospace, satellite navigation and positioning, punctuality and physical science. However, due to its huge size and high price, the further expansion of its application range is limited, and the miniaturization of atomic clocks will greatly expand its application range, which will have a profound impact on the fields of communication, electronics, aviation, aerospace, national defense, etc., and in The installation of atomic clocks in various measuring instruments will also make the measurements more accurate and reliable. Due to the existence of microwave resonators, the size of traditional atomic clocks is difficult to further ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
Inventor 吴亚明李绍良徐静
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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