Vacuum atomization suspension uniform sputtering coating method for spherical powder material

Abstract

The invention discloses a vacuum atomization suspension uniform sputtering coating method for a spherical powder material. Spherical powder is placed in a vacuum atomization tank; a cathode sputtering target and an anode body are arranged in the vacuum atomization tank; in the vacuum environment, when high-energy particles accelerated by an electric field or a magnetic field impact the surface of the cathode sputtering target, atomic molecules on the surface of the target carry out momentum exchange with the high-energy particles, so that atoms or molecules are splashed out of the surface of the target and have a certain energy; when the splashed atoms or molecules are collided with the spherical powder which is atomized and suspended in the vacuum, thin film deposition on the spherical powder is implemented. According to the invention, the high-performance spherical powder material which has functions of high and low temperature resistance, high-pressure resistance, moisture resistance, corrosion resistance, antioxidation and the like, has excellent performance, meets different requirements and has special functions can be produced; the antioxidant surface of the spherical metal powder can be subjected to functionalization processing.

Description

technical field [0001] The invention relates to a vacuum atomization suspension uniform sputter coating method for a spherical powder material, which belongs to the fields of chemistry and metallurgy. Background technique [0002] Spherical powder materials are made of high-temperature fusible materials, which have a certain particle size after crushing, screening, grinding, grading and other production processes. The particle size is between a few microns and hundreds of microns. It is made by spheroidization and is widely used in high-tech fields such as aerospace, aviation, navigation, fine chemicals, large-scale integrated circuits, special ceramics, and daily chemicals. It has small diameter, good lubricating fluidity, easy dispersion, and smooth surface. A new type of high-tech material with a large specific surface area. [0003] The existing surface functional treatment methods for powder materials are mainly physical coating, surface chemical coating, precipitatio...

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Problems solved by technology

[0003] The existing surface functional treatment methods for powder materials are mainly physical coating, surface chemical coating, precipitation reaction modification and other methods. These methods cannot solve the problem of spherical powder materials, such as spherical quartz powder, spherical silica powder, Hollow glass microspheres, glass microspheres, spherical metal powders and other spherical powder materials have the problem of uniform coating on the surface of microspheres, so it is impossible to produce high and low temperature resistance, high pressure resistance, moisture resistance, corrosion resistance, oxidation resistance, etc. Functional, with excellent performance, meeting different requirements, high-performance spherical powder materials with special functions, such as electromagnetic shielding materials, powder materials for conductive adhesives, and cannot complete the anti-oxidation surface functionalization treatment of spherical metal powders, etc.

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