Method for manufacturing Ag/C nano interconnecting wire in coaxial-cable structure
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- NANJING UNIV
- Publication Date
- 2013-12-18
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a metal interconnect nanowire applied to a micro-device and a preparation method thereof, especially an Ag / C nanowire with a coaxial cable structure and a length of up to hundreds of microns (the Ag wire is the core, and the carbon coating is the shell. ) preparation method. Background technique
[0002] Metal nanowires have become the focus of extensive research in the world because of their broad application prospects in micro-devices. They are often used as interconnect materials and functional building blocks in electronic, optical, and nanosensing devices. They are also the materials of choice for studying the dimensionality and size dependence of the electrical and thermal transport behavior of small-scale metallic materials. However, nanowires are prone to oxidation and performance failure due to their high specific surface area. Experiments have confirmed that bare metal (such as germanium, molybdenum, silver, copper...