Vertically Coupled Mach-Zehnder Interferometric Microring Resonator Optical Biochemical Sensor Chip
A micro-ring resonant cavity, vertical coupling technology, applied in the measurement of phase influence characteristics, etc., can solve the problems of difficult detection, low sensitivity, low energy density of evanescent waves, etc., achieve high quality factor, reduce performance requirements, transmit Sensitivity-enhancing effect
Inactive Publication Date: 2016-04-13
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology
[0005] The purpose of the present invention is to solve the detection problem of some biochemical substances, on the basis of the mainstream biochemical sensor based on optical detection in the prior art, in order to further solve the existing problems of using evanescent wave detection principle and single system detection The low energy density of the evanescent wave leads to difficult detection, narrow measurement range and low sensitivity of a single system. A vertically coupled Mach-Zehnder (MZ) interferometric optical resonant cavity biochemical sensor chip is proposed.
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[0018] Such as figure 1 , 2 As shown, the vertically coupled Mach-Zehnder interferometric microring resonator optical biochemical sensor chip of this embodiment includes a silicon base layer 41, a silicon dioxide layer 42 and a single crystal silicon layer 43 that are bonded sequentially from bottom to top. The SOI substrate, the single crystal silicon layer 43 of the SOI substrate contains a U-shaped waveguide and a micro-ring resonator 3, and the U-shaped waveguide is such as figure 1 As shown by the dotted line, the input straight waveguide 11, the output straight waveguide 12 and the semi-circular ring waveguide 13 are coupled to form a planar U-shaped structure, and the microring resonator 3 includes at least two sections of semi-circular ring waveguides 31, and the semi-circular ring waveguide is coupled to form a planar ring structure ; The microring resonator 3 is located directly above the U-shaped waveguide, the overlapping distance between the two is 0, and they ar...
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Abstract
The vertically coupled Mach-Zehnder interference type microring resonator optical biochemical sensor chip of the present invention comprises an SOI substrate composed of a silicon base layer, a silicon dioxide layer and a single crystal silicon layer sequentially stacked and bonded from bottom to top, and the SOI substrate The single crystal silicon layer includes a U-shaped waveguide and a micro-ring resonant cavity; the micro-ring resonant cavity is located directly above the U-shaped waveguide, and the two overlap and couple in the vertical direction of the U-shaped waveguide plane. In the comb-like transmission line of the microring resonator, the resonant peak corresponding to the peak of the MZ interference comb-like transmission line of the biochemical sensor chip will make the transmission line very sharp due to the modulation effect, so this sensor can be used in addition to In addition to having a large free spectral range, it also has a high quality factor.
Description
technical field [0001] The invention relates to the detection technology of specific chemical or biological substances such as gas molecules or biomolecules, in particular to the field of optical sensing technology, in particular to a Mach-Zehnder (MZ) interference type microring resonator optical biochemistry based on vertical coupling sensor chip. Background technique [0002] A biochemical sensor is a combination of a bioactive material and a corresponding transducer, which is used to measure a specific chemical or biological substance. Since the determination of these chemical or biological substances is of great significance in environmental monitoring, disease monitoring and drug development, the research on biochemical sensors has become very important. At present, typical optical biochemical sensors can be mainly divided into two categories: fluorescent-labeled optical biochemical sensors and unlabeled optical biochemical sensors. According to relevant literature, a...
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IPC IPC(8): G01N21/45
Inventor 王卓然袁国慧高亮王维
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA