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A fast cycle air-cooled vacuum furnace

A fast-cycle, vacuum furnace technology, applied in furnaces, furnace cooling, furnace components, etc., can solve problems affecting processing quality, furnace chamber size and process limitations, waste of inert gas, etc., and achieve a wide range of annealing processes and wide use conditions , uniform air cooling effect

Active Publication Date: 2016-06-15
BEIJING TECHNOL SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the size of the material is limited, and the opening and closing process of the cooling chamber will affect the processing quality of the material in the furnace chamber to a certain extent.
In addition, the temperature and chamber pressure cannot be accurately controlled when gas quenching is used for materials that cannot be water quenched or oil quenched.
Chinese patent CN201110125236.4 also designed a similar cooling scheme, and added circulating water cooling to the chamber wall and screen door, but similarly, there are also disadvantages such as uncontrollable chamber pressure during air cooling
[0006] But in general, although the way of separating the furnace chamber into a heating chamber and a cooling chamber can improve the efficiency of the vacuum furnace to a certain extent, the multi-chamber and water-cooling design has limited application range, no energy saving and impact Processing quality and other shortcomings; and the air cooling design has great restrictions on the size and process of the furnace chamber, which not only wastes a lot of inert gas, but also easily affects the stability of the workpiece quality

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] After the CVD diamond is annealed from 1100°C to 500°C in a fast-circulating air-cooled vacuum furnace, the bypass is closed, and a hydrogen-argon gas mixture is introduced until the chamber pressure is 3.0KPa. Turn on the rapid cycle air cooling system and turn on the water cooling device. Adjust the frequency conversion motor and water cooling device to make the system reduce the temperature of CVD diamond from 500°C to below 100°C within 15 minutes.

Embodiment 2

[0041] After the tungsten carbide powder compact is sintered at 1400°C in a fast-circulating air-cooled vacuum furnace, the bypass is closed and hydrogen gas is introduced until the chamber pressure is 0.5KPa. Turn on the rapid cycle air cooling system and turn on the water cooling device. Adjust the frequency conversion motor and water cooling device to make the system reduce the temperature of the cemented carbide blank from 1400°C to 700°C within 2 hours. Continue to feed hydrogen until the chamber pressure is 2KPa, adjust the frequency conversion motor and water cooling device, and the system will reduce the temperature of the cemented carbide blank from 700°C to below 100°C within 30 minutes.

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Abstract

The invention is a fast-cycle air-cooled vacuum furnace, comprising a fast-cycle air-cooled vacuum furnace and a fast-cycle air-cooling system. The fast-cycle air-cooled vacuum furnace is used in the fields of materials and machinery. In the present invention, the Roots pump, frequency conversion motor and water cooling system are connected in series with the vacuum furnace to form a circulating gas circuit, and the high compression ratio of the Roots pump at low pressure is used to make the rare gas continuous and uniform in any size and shape of the vacuum furnace. ground cycle. Coupled with the water cooling devices on both sides, the materials in the vacuum furnace can be quickly cooled. This fast cycle air-cooled vacuum furnace will greatly increase the use range and efficiency of the vacuum furnace, improve the control range and accuracy of the temperature and pressure of the vacuum furnace, and improve the temperature uniformity of multiple workpieces.

Description

technical field [0001] The invention relates to a fast-circulation air-cooled vacuum furnace, in particular to a rapid-circulation air-cooling system of the vacuum furnace. Background technique [0002] Vacuum furnace (Vacuum furnace) is an industrial furnace that uses a vacuum system to make the chamber pressure less than a standard atmospheric pressure to achieve a certain degree of vacuum. Due to the vacuum environment in the furnace cavity, the vacuum furnace is endowed with the advantages of no impurities, no pollution, low energy consumption and easy temperature control, so it is also widely used in the fields of heat treatment, powder sintering and vacuum brazing. Some high-tech functions The preparation of materials also relies on the vacuum clean environment of the vacuum furnace. [0003] However, the high vacuum degree and heat preservation effect also bring disadvantages to the vacuum furnace. Generally, the vacuum furnace has a multi-layer reflective screen, w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F27D9/00
Inventor 施戈彭建陈良贤
Owner BEIJING TECHNOL SCI