MOCVD apparatus and MOCVD heating method
A technology of equipment and trays, applied in chemical instruments and methods, gaseous chemical plating, crystal growth, etc., can solve the problems of film growth speed difference, uneven temperature, inconsistent deposited film, etc., and realize the processing of large-size substrates , Improve temperature uniformity, improve the effect of growth quality
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[0037] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the MOCVD equipment and the heating method of the MOCVD equipment provided by the embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0038] The present invention provides a MOCVD equipment, which includes a reaction chamber, an induction coil and a tray. In addition to the above structure, MOCVD equipment also includes gas transport systems, exhaust gas treatment systems and other devices.
[0039] Among them, the MOCVD equipment is an induction heating MOCVD equipment, the induction coil is located outside the reaction chamber, the induction coil is connected to the RF power supply of medium and high frequency, used to generate a magnetic field during the process and through the magnetic field to the reaction chamber The tray is heated. The invention uses the distribution law of the magnetic fi...
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