Common wiring microelectrode array chip and manufacturing method thereof
A micro-electrode array and co-wiring technology, applied in the field of cell micro-electrode array chip and its preparation, can solve the problem of single use, etc., and achieve the effects of excellent conductivity, novel structure and high sensitivity
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[0034] This embodiment relates to a co-wiring micro-electrode array chip, its structure is as follows Figure 4 As shown, the microelectrode array structure layer on the chip includes a plurality of microelectrodes 1 arranged in a grating array structure and a plurality of microelectrodes 5 arranged in a dot-like array structure superimposed on the grating array.
[0035] The co-wiring microelectrode array chip of this embodiment adopts a new structural design and process, specifically: designing a first mask with a grating array structure and a second mask with a dot matrix array structure in a certain arrangement ; Deposit a layer of metal on the glass substrate, use the first mask, and use photolithography technology to prepare the grating array electrode with the required photoresist structure; use the mask of photoresist and metal, and use ion beam etching technology , open a metal window to obtain a grating electrode array chip; then deposit SiO on the chip in turn 2The...
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