A kind of imitation gecko foot micro-nano hierarchical structure and its manufacturing process

Abstract

The invention discloses a manufacturing technology for a gecko-foot-simulated micro-nano grading structure. The manufacturing technology comprises the steps of S1, thermally growing a layer of SiO2 thin film on a clean silicon slice through an LPCVD (low pressure chemical vapor deposition) equipment; S2, spin-coating the surface of the silicon slice with the SiO2 layer with photoresist for photoetching to prepare a circular-hole array pattern; S3, etching the exposed SiO2 through a buffering hydrofluoric acid solution, and transferring the pattern on the photoresist to the SiO2 layer; S4, plating the surface of a sample with a layer of Cu film; S5, performing ultrasonic treatment on acetone or ethyl alcohol, and removing the photoresist from the surface and Cu from the surface of the photoresist through a soluble stripping-off technology; S6, growing a Si micron linear array through a CVD-VLS (chemical vapor deposition-vapor liquid solid) growth technology by taking the Cu prepared by the technology as a catalyst, SiCl4 as a silicon source and H2 as carrier gas; S7, plating the surface of a silicon wire with a layer of Cu film; S8, growing Si nano wires on the surface of the Si micron wire through the CVD-VLS growth technology by taking the Cu prepared in the S7 as a catalyst, the SiCl4 as the silicon source and the H2 as the carrier gas. The Si nano wires are distributed on the surface of the Si micron wire in the micro-nano grading structure provided by the invention, so that the gecko-foot-simulated micro-nano grading structure is obtained; a solution is supplied to design and manufacturing of a dry adhesive material.

Description

technical field [0001] The invention belongs to the field of micro-nano manufacturing, and in particular relates to a manufacturing process of a bionic micro-nano hierarchical structure. Background technique [0002] In nature, geckos can walk freely on smooth walls, and even crawl quickly on the ceiling. This phenomenon was observed by Aristotle as early as the fourth century BC. The specific adhesion characteristics of gecko feet have attracted the attention of many scholars, and research on its adhesion mechanism is continuing. In 2000, Autumn and others from the Lewis-Clark College of the United States wrote an article in Nature. They accurately measured the adhesion of a single gecko foot setae and pointed out that geckos rely on the van der Waals force between the foot setae and the surface of the object to adhere to the object. The surface reveals the secret of the gecko's easy and fast walking—the micro-nano hierarchical structure of the setae on the gecko's feet en...

AI Technical Summary

Problems solved by technology

[0006] However, the growth of silicon nanowires needs to be evenly coated with a noble metal film, such as copper, gold, etc., and the existing metal coating methods, such as electron beam evaporation coating, magnetron sputtering coating, etc. It is difficult to prepare uniform films on micron wires, which leads to the unsatisfactory performance of the current hierarchical structure of silicon nanowires, and there are problems in process cost and practicability

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