Method for processing graphene superlattice nano-structure with atomic force microscope

Abstract

The invention relates to the technical field of nano processing, in particular to a method for processing a graphene superlattice nano-structure with an atomic force microscope. The method for processing the graphene superlattice nano-structure with the atomic force microscope comprises the steps that a manual vacancy defect is formed on graphene in the mode of applying pulse voltages to a needle point of the atomic force microscope, and then anisotropic etching is carried out on the graphene through a hydrogen-contained plasma. According to the method, nano hole array patterns with a period smaller than a 200 nm can be achieved on the graphene. The period of the graphene superlattice nano-structure and nanoribbon width are controllable. A processing method of the needle point of the atomic force microscope is simple and free of inducing additional pollution means, and an obtained device is clean. In addition, with the assistance of the needle point array processing technology, the method can be used for device integration and mass production of graphene nano-structure devices.

Description

technical field [0001] The invention relates to the technical field of nano-processing, in particular to a method for processing graphene superlattice nanostructures by using an atomic force microscope. Background technique [0002] Graphene is a monoatomic layer of graphite with excellent electrical properties. Its electron mobility is as high as 100,000cm2V-1s-1. It was first prepared by scientists from the University of Manchester in 2004 (Science306,666(2004)). Electrons in single-layer graphene have a linear dispersion relationship near the Dirac point, and belong to massless Dirac fermions, whose Fermi speed is 1 / 300 of the speed of light. Therefore, the discovery of this material is a study of the physical properties of condensed matter materials. And computing provides an ideal way to realize it. [0003] The electrical properties of the graphene superlattice porous nanostructure are affected by both the quantum confinement effect and the modulation of the periodic ...

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Problems solved by technology

[0004] This kind of graphene superlattice nanostructure can be prepared by traditional micro-processing methods, but its processing is difficult, and the resolution is limited by the neighbor effect of electron beam exposure. It is difficult to control the period of the holes below 200nm.

The prior art provides a structure of using self-assembled copolymer nanoparticles as a mask to prepare graphene nanonets (Nature Nanotechnology 5, 190 (2010)). Although this method can reach a period below 100nm, the void There is no strict periodicity, and at the same time, it has the same problem as the nanostructure prepared by microprocessing, that is, the edge of graphene is a rough disordered structure, which reduces the electrical properties of the device to a certain extent.

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