Manufacturing device for electronic circuit based on graphene and manufacturing method thereof

Abstract

The invention discloses a manufacturing device for an electronic circuit based on graphene and a manufacturing method thereof. The manufacturing device comprises a precise injector, a micro-nano fiber collecting board, a control system, a high-voltage direct current power source, an electrostatic spinning nozzle, a micro-nano fiber, a graphene layer, a substrate, an X-Y platform and a graphene oxidation environment device. The substrate is used for protecting the circuit, the graphene layer is deposited on the substrate and used for manufacturing materials of the circuit, and a near-field electrospining direct technology is used for forming the pattern track of the circuit. The graphene oxidation process is used for precipitation of the circuit. According to the manufacturing device for the electronic circuit based on the graphene and the manufacturing method thereof, the electricity conductivity or the semiconductor property shown by different belt widths of graphene belts is utilized, a conductor or a transistor can be formed on the graphene layer, the graphene is used as a receiving plate for electrostatic spinning, and the near-field electrospining direct technology can be used for conducting controllable deposition of micro-nano fiber patterns on the graphene, the circuit track is manufactured, the non-electricity-conductivity of the oxidized graphene is used, the graphene which is not protected by the micro-nano fiber can be oxidized, and therefore the circuit is precipitated.

Description

technical field [0001] The invention is a graphene-based electronic circuit manufacturing equipment and a manufacturing method thereof, and belongs to the innovative technology of graphene-based electronic circuit manufacturing equipment and a manufacturing method thereof. Background technique [0002] Electrospinning technology Electrospinning technology was first proposed by Formhzls in 1934 [1], and then Taylor et al. proposed the concept of Taylor cone in 1964 on the deformation of charged polymers in the electrospinning process [2], until the last In the 1990s, people began to pay more attention to electrospinning technology. However, nanofibers produced by electrospinning are difficult to collect in an orderly manner, and it is also difficult to arrange them in an orderly manner. In 2006, Sun Daoheng and others proposed the near-field electrospinning direct-writing technology[3]. The electrospinning direct-writing technology based on near-field electrospinning utilize...

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Problems solved by technology

[0006] The various excellent properties of graphene materials have made it used in many applications, including replacing copper to form electrical conductivity, and directly producing transistors on graphene, as well as the application of flexible electronic product circuits, MEMS / NEMS circuits, etc. Traditional production The process is based on the principle of photolithography, but this process is greatly limited by the size

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