Motherboard of holographic concave blazed grating and manufacturing method of motherboard

Abstract

The invention discloses a motherboard of a holographic concave blazed grating and a manufacturing method of the motherboard. The manufacturing method comprises the steps that (1) a holographic concave grating mask is manufactured; (2) a metal layer is deposited on the holographic concave grating mask; (3) the meal layer is coated with an adhesion agent; (4) the metal layer connected with a male die is separated from the holographic concave grating mask and cleaned, and a convex metal grating mask is obtained; (5) a grating tooth structure of the convex metal grating mask is measured, and grating tooth duty ratio information is obtained, and the duty ratio of grating teeth is adjusted through an electroforming or film coating method and a chemical etching or ion etching method; (6) the convex metal grating mask is etched through ion beams to be converted into a triangular blazed structure, and the motherboard of the holographic concave blazed grating is obtained. According to the motherboard of the holographic concave blazed grating and the manufacturing method of the motherboard, the concave grating mask structure is transferred to the convex metal layer, the metal layer is good in flexibility, the transfer precision of the grating groove type structure is high, cracking and deformation are not prone to occurrence, and durability is good.

Description

technical field [0001] The invention relates to a diffractive optical element, in particular to a master plate of a holographic concave blazed grating and a preparation method thereof. Background technique [0002] Grating is a widely used and important high-resolution dispersive optical element, which plays an important role in modern optical instruments. The concave grating is an important dispersion element in the spectroscopic instrument, which has both dispersion and imaging functions, and can directly form a spectroscopic instrument with only one optical surface. Compared with mechanical scanning spectrometers, concave grating spectrometers using planar array detectors have the characteristics of simple structure, fast spectral scanning speed, good repeatability, and low mechanical failure rate. Compared with machine-engraved concave gratings, concave gratings made based on holographic technology have lower noise and are favored by high-end spectroscopic instruments. ...

AI Technical Summary

Problems solved by technology

However, due to the different angles relative to the ion beam in different areas of the concave surface substrate, and the inherent disadvantages of the concave surface blocking the ion beam, the angle of the groove shape of the triangular grating varies greatly along the distribution of the concave surface, and some areas even have no diffraction efficiency, which ultimately affects the concave grating. The overall diffraction efficiency of

For small F / # concave grating problem will be more serious

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