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Spatial modulation spectrometer based on grid beam splitter and manufacturing method

A space modulation and production method technology, applied in the direction of interference spectroscopy, color/spectral characteristic measurement, instruments, etc., can solve the problems of unfavorable real-time performance and online measurement, large volume, heavy weight, expensive operation and maintenance costs, etc., and achieve light weight , Small size, simple structure

Active Publication Date: 2014-08-27
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] In order to solve the problem that there are movable parts in the structure of the existing spectrometer, which leads to its large volume and weight, expensive operation and maintenance costs, and is not conducive to the realization of real-time and on-line measurement, it provides a grid beam splitter-based spectrometer Spatial modulation spectrometer and manufacturing method

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  • Spatial modulation spectrometer based on grid beam splitter and manufacturing method
  • Spatial modulation spectrometer based on grid beam splitter and manufacturing method

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specific Embodiment approach 1

[0023] Specific implementation mode 1. Combination Figure 1 to Figure 3 Describe this embodiment, the spatial modulation spectrometer based on the grid beam splitter, the system structure consists of an infrared light source 1, a collimation system 2, a sample cell 3, a beam reduction system 5, an infrared CCD 5, a grid beam splitter 7, multiple It consists of a step-by-step micro-mirror 9 and a multi-step micro-mirror 8. The light emitted by the infrared light source 1 is collimated into infrared parallel light after being passed through the collimation system 2. After the infrared parallel light is absorbed by the sample in the sample cell 3, it is then The coherent two beams are split by the grid-type beam splitter 7 . A beam of light is incident on the multi-level large step micro-mirror 9 , and returns to the grid-type beam splitter 7 after being reflected by the multi-level large step mirror 7 . Two other beams of light are incident on the multi-level small step micro-...

specific Embodiment approach 2

[0028] Specific embodiment two, combine Figure 4 to Figure 6 This embodiment is described. This embodiment is the manufacturing method of the spatially modulated spectrometer based on the grating beam splitter described in the first embodiment. The method is implemented by the following steps:

[0029] a. Make the base of the attenuator system, select the base material to make the base, the material can be aluminum or copper or titanium or stainless steel or silicon etc. The base material is manufactured according to the size requirements of the design, and the upper surface is polished; the roughness of the polished surface is less than or equal to 10 microns, and the flatness is less than or equal to 50 microns.

[0030] b. If Figure 4 As shown, the reference lines perpendicular to each other are made on the polished substrate by precision machining method or MOEMS-based photolithography and etching method as the first optical axis reference line 10 and the second optical...

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Abstract

The invention relates to the field of spectral analysis instruments, in particular to a spatial modulation spectrometer based on a grid beam splitter and a manufacturing method. The spatial modulation spectrometer based on the grid beam splitter and the manufacturing method resolve the problems that movable components exist inside the structure of an existing spectrometer, so that the spectrometer is large in size and weight. The spatial modulation spectrometer based on the grid beam splitter comprises a collimation system, a sample pool, an interference system, a beam contracting system and a detector, wherein the interference system comprises a multi-stage small-ladder micro reflection mirror, the grid beam splitter and a multi-stage large-ladder micro reflection mirror; the light emitted by an infrared light source is collimated by the collimation system and becomes infrared parallel light, and the parallel light is absorbed by samples of the sample pool and then split by the grid beam splitter into two coherent light beams; the two light beams enter the multi-stage large-ladder micro reflection mirror and the multi-stage small-ladder micro reflection mirror respectively, and then are reflected to the grid beam splitter through the multi-stage small-ladder micro reflection mirror; after the light reflected by the grid beam splitter passes through the beam contracting system, interference fringes are obtained on the infrared area-array detector; Fourier transform is carried out on the interference fringes, and then the spectral information of an object to be detected can be obtained.

Description

technical field [0001] The present invention relates to the field of spectral analysis instruments, and relates to a manufacturing method of a novel spatially modulated Fourier transform infrared spectrometer, in particular to a spatially modulated Fourier transform infrared spectrometer based on a grid-type beam splitter and a multi-level stepped micro-mirror How the system is made. Background technique [0002] Due to its high luminous flux and multi-channel transmission capability, Fourier transform spectrometer is widely used in the analysis of material spectral characteristics. It can perform high-precision spectral measurement, perform qualitative or quantitative analysis, and detect unknown substances, so it has been widely used in many fields. At present, there is an urgent need for high-precision, miniaturized and lightweight Fourier infrared spectroscopy analysis systems in the fields of environmental and security monitoring, medical analysis and detection, space ...

Claims

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Application Information

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IPC IPC(8): G01J3/45G01N21/35G01N21/01
Inventor 梁中翥王维彪梁静秋吕金光秦余欣田超王文丛
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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