Large-stroke column coordinate two-photon polymerization processing method and device

Abstract

The invention relates to a large-stroke column coordinate two-photon polymerization processing method and device and belongs to the technical field of micro-nano manufacturing. The method includes that a test piece is mounted on a C shaft turntable in a coaxial or abaxial manner, the C shaft turntable is in rotary motion around the z axis to enable femtosecond laser beams to be in circumferential motion relatively to the test piece, a C shaft is mounted on the x-axis sliding plate and is in linear feeding motion along the x-axis direction to enable the femtosecond laser beams to be in radial motion relatively to the test piece, the femtosecond laser beams are enabled to be in quick reciprocating motion along the radial direction of the C shaft turntable through swinging of a two-dimensional galvanometer around the x axis and the Y axis, feeding motion of a focusing center of the femtosecond laser beams along the z-axis direction is acquired through translational motion of a z-axis sliding plate along the z-axis direction, and when the test piece is mounted in the abaxial manner, rotating speed of the C shaft turntable can be changed in real time to enable the femtosecond laser beams to acquire a same speed at each expected scanning position. By the large-stroke column coordinate two-photon polymerization processing method and device, back-off of a moving shaft is avoided, disturbed paths can be tracked quickly and precisely, and quick processing of large-area three-dimensional micro-nano structures is realized.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a large-stroke cylindrical coordinate two-photon polymerization processing method and device. Background technique [0002] Two Photon Polymerization (TPP) is considered to be a very promising processing method to obtain "true" three-dimensional micro-nano structure devices, and has extremely attractive application prospects in many important industrial fields. For example, the TPP method can be used to fabricate three-dimensional metamaterial devices, micro-nano structured optical elements, three-dimensional bionic functional surface devices, etc. [0003] How to scan and expose the focusing body formed by the femtosecond laser beam focusing according to the pre-designed path inside the specimen material is one of the keys of the TPP method. So far, there are some basic technical solutions as follows: (1) Install the specimen on a two-dimensional or...

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Problems solved by technology

[0004] These existing technical solutions mainly have the following problems to be solved: (1) the stroke obtained by using a two-dimensional vibrating mirror is very limited, and it is not suitable for making a large-area three-dimensional micro-nano structure device; The moving table has high reciprocating motion accuracy, but the obtained stroke and operating frequency are very limited; (3) Whether it is a small-stroke driving table or a large-stroke air-floating motion axis, they are all rectangular coordinates. Using two straight-line motions to approach a curved motion inevitably has an interpolation error; (4) using a large-stroke air-floating motion axis, although a large stroke can be obtained, if it is necessary to traverse the expected voxel position on each slice, There is unavoidable backlash in the three motion axes x, y, or z, which makes it difficult to guarantee the motion accuracy; (5) Whether it is scanning of piezoelectric micro-displacement platforms, high-precision motion axes x, y, or z scanning driven by linear motors It is difficult to ensure that the scanning speed at each voxel position is equal to the two-dimensional galvanometer scanning

When the scanning speed is different, the exposure time is different, and the obtained voxel size will be different, which will affect the processing accuracy of two-photon polymerization; (6) because two-photon polymerization is point-by-point scanning processing, the processing efficiency is low

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