Large-stroke column coordinate two-photon polymerization processing method and device

A technology of two-photon polymerization and processing methods, applied in metal processing equipment, manufacturing tools, laser welding equipment, etc., can solve the problem of affecting the processing accuracy of two-photon polymerization, unsuitable for three-dimensional micro-nano structure devices, limited travel and operating frequency, etc. problem, to achieve the effect of equal exposure time, high productivity, and large working stroke

Inactive Publication Date: 2014-09-10
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] These existing technical solutions mainly have the following problems to be solved: (1) the stroke obtained by using a two-dimensional vibrating mirror is very limited, and it is not suitable for making a large-area three-dimensional micro-nano structure device; The moving table has high reciprocating motion accuracy, but the obtained stroke and operating frequency are very limited; (3) Whether it is a small-stroke driving table or a large-stroke air-floating motion axis, they are all rectangular coordinates. Using two straight-line motions to approach a curved motion inevitably has an interpolation error; (4) using a large-stroke air-floating motion axis, although a large stroke can be obtained, if it is necessary to traver

Method used

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  • Large-stroke column coordinate two-photon polymerization processing method and device
  • Large-stroke column coordinate two-photon polymerization processing method and device
  • Large-stroke column coordinate two-photon polymerization processing method and device

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specific Embodiment approach

[0058] A kind of specific embodiment that realizes device of the present invention is as follows:

[0059] The support 1 is connected to the marble bed 10 through 4 hexagon socket head screws 2, the beam splitter 3 is installed on the support 1, the reflector 3 7 is fixedly connected with the vibrating mirror box 21, and the x-axis sliding plate 15 Slidingly connected with the air-floating linear guideway 13, the linear motor 14 is connected with the air-floating linear guideway 13 and installed on the marble bed 10, the C-axis turntable 16 is stacked on the x-axis slide plate, the base 17 is connected to the C-axis The turntable is fixedly connected, the z-axis sliding plate 26 is slidingly connected to the air-floating linear guide rail 2 19, the linear motor 27 is connected to the air-floating linear guide rail 2 19, the air-floating linear guide rail 2 19 is connected to the bottom plate 11, and the bottom plate 11 passes through 6 inner hexagons The cylindrical head screw...

Embodiment approach

[0060] One embodiment of the present invention is: a linear motor is composed of a mover 1401 and a stator 1402, the stator is installed on the sliding plate 15 through a hexagon socket head screw 33, and the stator is installed on the slide plate through a hexagon socket head screw 36 15 on.

[0061] One embodiment of the present invention is: the C-axis turntable 16 is equipped with a rotary grating 1609, a reading head 3 1611, and the reading head 3 1611 is fixedly connected with the fixing seat 1610, supported by an air bearing shaft 1602, which is mounted on an air bearing On 1604, the servo motor is composed of a servo motor stator 1607 and a servo motor rotor 1608. The air bearing 1604 is installed on the support frame 1603 through the hexagon socket head screw 1601, and the support frame is installed on the base 1612 through the socket head cap screw 1605. The intake valve 1606 is fixedly connected to the outside of the base;

[0062] One embodiment of the present inv...

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Abstract

The invention relates to a large-stroke column coordinate two-photon polymerization processing method and device and belongs to the technical field of micro-nano manufacturing. The method includes that a test piece is mounted on a C shaft turntable in a coaxial or abaxial manner, the C shaft turntable is in rotary motion around the z axis to enable femtosecond laser beams to be in circumferential motion relatively to the test piece, a C shaft is mounted on the x-axis sliding plate and is in linear feeding motion along the x-axis direction to enable the femtosecond laser beams to be in radial motion relatively to the test piece, the femtosecond laser beams are enabled to be in quick reciprocating motion along the radial direction of the C shaft turntable through swinging of a two-dimensional galvanometer around the x axis and the Y axis, feeding motion of a focusing center of the femtosecond laser beams along the z-axis direction is acquired through translational motion of a z-axis sliding plate along the z-axis direction, and when the test piece is mounted in the abaxial manner, rotating speed of the C shaft turntable can be changed in real time to enable the femtosecond laser beams to acquire a same speed at each expected scanning position. By the large-stroke column coordinate two-photon polymerization processing method and device, back-off of a moving shaft is avoided, disturbed paths can be tracked quickly and precisely, and quick processing of large-area three-dimensional micro-nano structures is realized.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a large-stroke cylindrical coordinate two-photon polymerization processing method and device. Background technique [0002] Two Photon Polymerization (TPP) is considered to be a very promising processing method to obtain "true" three-dimensional micro-nano structure devices, and has extremely attractive application prospects in many important industrial fields. For example, the TPP method can be used to fabricate three-dimensional metamaterial devices, micro-nano structured optical elements, three-dimensional bionic functional surface devices, etc. [0003] How to scan and expose the focusing body formed by the femtosecond laser beam focusing according to the pre-designed path inside the specimen material is one of the keys of the TPP method. So far, there are some basic technical solutions as follows: (1) Install the specimen on a two-dimensional or...

Claims

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Application Information

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IPC IPC(8): B23K26/08B23K26/082
CPCB23K26/0823B23K26/083B23K26/0869
Inventor 周晓勤侯燚红林洁琼王文攀
Owner JILIN UNIV
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