Large-stroke column coordinate two-photon polymerization processing method and device

A technology of two-photon polymerization and processing methods, applied in metal processing equipment, manufacturing tools, laser welding equipment, etc., can solve the problem of affecting the processing accuracy of two-photon polymerization, unsuitable for three-dimensional micro-nano structure devices, limited travel and operating frequency, etc. problem, to achieve the effect of equal exposure time, high productivity, and large working stroke
CN104028890AInactive Publication Date: 2014-09-10JILIN UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
JILIN UNIV
Publication Date
2014-09-10
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention relates to a large-stroke column coordinate two-photon polymerization processing method and device and belongs to the technical field of micro-nano manufacturing. The method includes that a test piece is mounted on a C shaft turntable in a coaxial or abaxial manner, the C shaft turntable is in rotary motion around the z axis to enable femtosecond laser beams to be in circumferential motion relatively to the test piece, a C shaft is mounted on the x-axis sliding plate and is in linear feeding motion along the x-axis direction to enable the femtosecond laser beams to be in radial motion relatively to the test piece, the femtosecond laser beams are enabled to be in quick reciprocating motion along the radial direction of the C shaft turntable through swinging of a two-dimensional galvanometer around the x axis and the Y axis, feeding motion of a focusing center of the femtosecond laser beams along the z-axis direction is acquired through translational motion of a z-axis sliding plate along the z-axis direction, and when the test piece is mounted in the abaxial manner, rotating speed of the C shaft turntable can be changed in real time to enable the femtosecond laser beams to acquire a same speed at each expected scanning position. By the large-stroke column coordinate two-photon polymerization processing method and device, back-off of a moving shaft is avoided, disturbed paths can be tracked quickly and precisely, and quick processing of large-area three-dimensional micro-nano structures is realized.
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Description

technical field

[0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a large-stroke cylindrical coordinate two-photon polymerization processing method and device. Background technique

[0002] Two Photon Polymerization (TPP) is considered to be a very promising processing method to obtain "true" three-dimensional micro-nano structure devices, and has extremely attractive application prospects in many important industrial fields. For example, the TPP method can be used to fabricate three-dimensional metamaterial devices, micro-nano structured optical elements, three-dimensional bionic functional surface devices, etc.

[0003] How to scan and expose the focusing body formed by the femtosecond laser beam focusing according to the pre-designed path inside the specimen material is one of the keys of the TPP method. So far, there are some basic technical solutions as follows: (1) Install the specimen on a two-dimensional or...

Claims

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