Manufacturing process of ultrathin crystal silicon flexible solar cell
A technology for solar cell sheets and manufacturing processes, applied in the field of solar cells, can solve problems such as easy breakage, and achieve the effects of avoiding debris, increasing curvature, and reducing warpage.
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Embodiment 1
[0045] Adopt 156×156cm 2 Single crystal silicon wafer with a thickness of 150 μm, using the above-mentioned process 1 for damage removal and textured process, single crystal silicon: 0.5-3Ω·cm, concentration of sodium hydroxide: 1%, concentration of isopropanol 5%, in React at 85°C for 25 minutes to form textured surfaces with uniform size on the silicon surface.
[0046] Fabrication of SiN on the front side using the PECVD deposition process described above x Protective film: SiN x The film thickness is 100nm. The refractive index is controlled at 2.1.
[0047] Thinning and removing SiN on the front side using the backside etch described above x Protective film process: the corrosion tank is a high-concentration sodium hydroxide solution, the concentration is 10%, the reaction time is 35mins, the thickness of the crystal silicon wafer is reduced from 150μm to 70μm after thinning. The cleaning tank is dissolved in 10% hydrofluoric acid, and the reaction time is 10mins to ...
Embodiment 2
[0054] Adopt 156×156cm 2 Single crystal silicon wafer with a thickness of 150 μm, using the above-mentioned process 1 for damage removal and textured process, single crystal silicon: 0.5-3Ω·cm, concentration of sodium hydroxide: 1%, concentration of isopropanol 5%, in React at 85°C for 25 minutes to form textured surfaces with uniform size on the silicon surface.
[0055] Fabrication of SiN on the front side using the PECVD deposition process described above x Protective film: SiN x The film thickness is 150nm. The refractive index is controlled at 2.1.
[0056] Thinning and removing SiN on the front side using the backside etch described above x Protective film process: the corrosion tank is a high-concentration sodium hydroxide solution with a concentration of 10%, and the reaction time is 30mins. The thickness of the crystal silicon wafer is reduced from 150μm to 100μm after thinning. The cleaning tank is dissolved in 10% hydrofluoric acid, and the reaction time is 15m...
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