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A method of making microchannel plate functional layer by atomic layer deposition technology

An atomic layer deposition and microchannel plate technology, applied in the field of functional layers, can solve the problems of short lifespan, unstable performance, and complicated fabrication of microchannel plate functional layers, and achieve the effect of prolonging lifespan, improving production efficiency, and having a dense structure.

Active Publication Date: 2016-12-07
东莞市中科原子精密制造科技有限公司
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Problems solved by technology

[0010] The invention provides a method for making a functional layer of a microchannel plate by using atomic layer deposition technology, so as to overcome the inherent defects of the functional layer prepared by the traditional hydrogen reduction technology of the microchannel plate, and solve the problem of complex manufacturing of the functional layer of the microchannel plate, unstable performance, and long service life. Not long and other problems, to create a resistance layer and emission layer with strong adhesion, smooth surface, uniform thickness, and high purity of composition, improve the performance stability of the micro-channel plate, and prolong its working life

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  • A method of making microchannel plate functional layer by atomic layer deposition technology
  • A method of making microchannel plate functional layer by atomic layer deposition technology
  • A method of making microchannel plate functional layer by atomic layer deposition technology

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[0043] The atomic layer deposition technology produces the resistance layer and the emission layer of the microchannel plate, which has extremely high precision requirements for various operations and parameters in the preparation process. Such as figure 1 As shown, according to the set procedure, the control system first opens the valve of the clean gas device to feed the clean gas into the vacuum chamber, and at the same time opens the valve of the vacuum pump pipeline to remove impurity gas, and at the same time detects the composition and concentration of the exhaust gas. When the concentration of clean gas in the exhaust gas reaches the set threshold, close the valve of the vacuum pump pipeline, and then close the valve of the clean gas device.

[0044] Then according to the doping sequence DEZ / TMA / H 2 O, Al-Zn doping ratio 19:1, exposure time DEZ / N 2 / H 2 O / N 2 =0.1s / 3s / 0.1s / 4s, TMA / N 2 / H 2 O / N 2 =0.1s / 3s / 0.1s / 4s, DEZ / N 2 / TMA / N 2 / H 2 O / N 2 =0.1s / 3s / 0.1s / 3s / ...

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Abstract

The invention provides a method for making a functional layer of a microchannel plate by using atomic layer deposition technology, so as to overcome the inherent defects of the functional layer prepared by the traditional hydrogen reduction technology of the microchannel plate, and solve the problem of complex manufacturing of the functional layer of the microchannel plate, unstable performance, and short lifespan. Not long and other problems, to manufacture a resistance layer and emission layer with strong adhesion, smooth surface, uniform thickness, and high purity of composition, improve the performance stability of the micro-channel plate, and prolong its working life.

Description

technical field [0001] The invention belongs to the technical field of manufacturing photoelectric imaging devices by microelectronic nanotechnology, and in particular relates to a method for manufacturing functional layers such as a resistance layer and an emission layer of a microchannel plate by using atomic layer deposition technology. Background technique [0002] Microchannel plate (MCP) is an excellent electron multiplier with small size, light weight, high gain, low noise, low operating voltage, short response time, high spatial resolution and time resolution, and strong radiation resistance. It can work normally in a strong magnetic field environment. It is mainly used as the core device of the image intensifier. It has high gain,. Microchannel plates are used as core devices in low-light night vision, image intensification equipment, and detectors, and are widely used in scientific instruments, medical imaging, satellite maps, reconnaissance, law enforcement, mil...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/44C23C16/52C23C16/40
Inventor 朱香平邓国宝
Owner 东莞市中科原子精密制造科技有限公司
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