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A kind of CRN coating preparation method on substrate surface

A substrate and coating technology, applied in the field of CrN coating preparation on the surface of the substrate, can solve the problems of difficult to meet the development of oceans and high friction coefficient of CrN coating, achieve good application value, improve comprehensive performance and service life, and high load-carrying capacity Effect

Active Publication Date: 2017-05-17
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the CrN coating that has been developed so far has a high friction coefficient in extremely harsh environments, which is difficult to meet the needs of marine development

Method used

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  • A kind of CRN coating preparation method on substrate surface
  • A kind of CRN coating preparation method on substrate surface
  • A kind of CRN coating preparation method on substrate surface

Examples

Experimental program
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Effect test

Embodiment 1

[0049] In this embodiment, the substrate is a stainless steel gear in a ship power plant, and a CrN coating is prepared on the surface of the substrate, and the preparation method is as follows:

[0050] (1) Pre-plating treatment

[0051] Put the substrate into petroleum ether, and clean it with ultrasonic stirring for 30 minutes. After removing the oil on the surface of the substrate, put it into acetone and ultrasonically clean it for 20 minutes, then ultrasonically clean it in absolute ethanol for 15 minutes, and finally take it out and dry it with nitrogen;

[0052] (2) Bias reverse sputter cleaning

[0053] Put the substrate treated in step (1) into the multi-arc ion plating chamber, the temperature of the chamber is 350°C, and the back vacuum is pre-evacuated to 4.00×10 -3 Pa; then, pass Ar gas with a purity greater than or equal to 99.999% into the cavity, the Ar gas flow rate is 100 sccm, the substrate is applied with a negative bias voltage, and the substrate is cont...

Embodiment 2

[0119] In this embodiment, the substrate is a stainless steel-based sealing ring in key marine components, and a CrN coating is prepared on the surface of the substrate. The preparation method is as follows:

[0120] The processing technical operation steps are:

[0121] (1) Same as step (1) in Example 1, implement ultrasonic cleaning to the substrate;

[0122] (2) Same as step (2) in Example 1, implement bias reverse sputtering cleaning to the substrate;

[0123] (3) Same as step (3) in Example 1, depositing a hard Cr transition layer on the substrate surface;

[0124] (4) Deposition of CrN hard wear-resistant coating

[0125] Cut off the Ar gas flow and keep the chamber vacuum at 4×10 -3 Pa, and then pass N into the cavity with a purity greater than or equal to 99.999% 2 As a reaction gas, the flow rate is 600sccm, and the vacuum degree is maintained at 3.5Pa; the Cr target current is increased to 70A, the deposition temperature is maintained at 400°C, and a negative bia...

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Abstract

The invention provides a method for preparing a CrN coating on the surface of a substrate. The method comprises the following steps: by using a multi-arc ion plating technique, taking Cr as a target and N2 as a reaction gas, applying current to the Cr target to deposit the CrN coating on the surface of the substrate, and in the deposition process, controlling the negative bias of the substrate to change in a gradient manner. According to the invention,, on one hand, the improvement of the corrosion resistance of the CrN coating is facilitated, and on the other hand, the structural compactness of the CrN coating is improved, so that the hardness, the abrasion resistance and the baring property of the CrN coating are improved. Therefore, the method is applicable to a substrate in a high-abrasion and high-corrosion working environment, like a mechanical movement basic part in ocean environment working, the reliability of the substrates is improved, and the service life of the substrate is prolonged.

Description

technical field [0001] The invention relates to the technical field of substrate surface treatment, in particular to a method for preparing a CrN coating on the surface of a substrate. Background technique [0002] At present, human society is facing an increasingly serious crisis of resource shortage and energy depletion, which seriously restricts the continued development of human society. However, the ocean, which accounts for 71% of the earth's surface area, contains rich resources and energy, which is the guarantee for the continuous development of human society. A treasure trove of resources for development. China is a big economy, but its domestic resources are scarce, and the development of marine resources has become a trend. [0003] However, compared with the freshwater environment, chloride ions in seawater account for 58% of the total salt content, and the average conductivity is 4×10 -2 S / cm is a strong corrosive medium. The high concentration of Cl- causes m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/32C23C14/06
CPCC23C14/06C23C14/32
Inventor 王永欣叶育伟李金龙郭峰薛群基
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI