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A Nanoscale Amplitude Measurement Method of Medium and High Frequency Vibration Under Low Frequency Random Disturbance

A random disturbance, high-frequency vibration technology, applied in measuring devices, measuring ultrasonic/sonic/infrasonic waves, instruments, etc., can solve the problem of poor measurement accuracy of weak vibration amplitude, and achieve the effect of improving measurement accuracy

Active Publication Date: 2017-05-24
严格集团股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem of poor measurement accuracy of weak vibration amplitudes measured by existing laser interferometry, the present invention proposes a nanoscale amplitude measurement method for medium and high frequency vibrations under low-frequency random disturbances

Method used

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  • A Nanoscale Amplitude Measurement Method of Medium and High Frequency Vibration Under Low Frequency Random Disturbance
  • A Nanoscale Amplitude Measurement Method of Medium and High Frequency Vibration Under Low Frequency Random Disturbance
  • A Nanoscale Amplitude Measurement Method of Medium and High Frequency Vibration Under Low Frequency Random Disturbance

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specific Embodiment approach 1

[0018] Specific implementation mode 1. Combination figure 1 and figure 2 Describe this embodiment, the method for measuring the nanoscale amplitude of medium and high frequency vibration under low-frequency random disturbance described in this embodiment, the method is realized based on the Michelson detection system, the system includes a laser 1, a beam splitter 2, and a corner cone prism 3 , mirror 4, photoelectric receiver 5 and No. 2 corner cube prism 6;

[0019] The laser light emitted by the laser 1 is separated by the beam splitter 2 and the beams are respectively incident on the No. 1 corner cube 3 and the reflector 4. The beam returned by the No. 1 corner cube 3 is incident on the beam splitter 2, and the beam after passing through the beam splitter is incident on the On the photosensitive surface of the photoelectric receiver 5, the light beam reflected by the reflector 4 is incident on the No. 2. The light beam after 2 is incident on the photosensitive surface o...

specific Embodiment approach 2

[0025] Specific embodiment 2. This embodiment is a further description of the nanoscale amplitude measurement method of medium and high frequency vibration under low-frequency random disturbance described in specific embodiment 1. The optical path difference between the reference light and the measurement light described in step 1 The modulation signal of is obtained by:

[0026] According to the basic principle of Michelson interference, the amplitude distribution of reference light:

[0027] E. b (t)=A b sin(ω 0 t+kz b +φ) (1)

[0028] In the formula, ω 0 is the reference optical angular frequency,

[0029] k is the wave number, λ is the laser wavelength;

[0030] Ф is the initial phase of the laser beam;

[0031] where A b is the reference light amplitude, t is the time, z b is the reference light arm length, c is the speed of light in vacuum, f 0 For the frequency of the laser beam, measure the amplitude distribution of the light:

[0032] E. c (t)=A c ...

specific Embodiment approach 3

[0045] Specific Embodiment 3. This embodiment is a further description of the method for measuring the nanoscale amplitude of medium and high frequency vibration under low-frequency random disturbance described in Embodiment 1. In step 2, the photodetector is used to receive the laser interference signal, and the The expression of the interference electrical signal in converting the optical signal to the interference electrical signal is:

[0046] The interference electrical signal is obtained by converting the light intensity signal, and the expression of the light intensity signal received by the photodetector is:

[0047]

[0048] Using Bessel's identity Expand the above light intensity signal as f s and f e The interferometric electrical signal is obtained as the sum of harmonic terms of the fundamental frequency:

[0049]

[0050] where x 1 =2kAe,x 2 =2kAs, j is an imaginary number symbol, β is a constant, is the phase angle, J n is the nth order Bessel fun...

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Abstract

The invention discloses a nanoscale amplitude measuring method of medium-high frequency vibration under low-frequency random disturbance, and relates to an amplitude measuring method of nanoscale medium-high frequency mechanical vibration under environmental low-frequency large-amplitude random disturbance. The nanoscale amplitude measuring method comprises the following steps: 1, detecting the surface of a measured object by utilizing a Michelson interference system to obtain the modulating signal of an optical path difference between reference light and measuring light; 2, utilizing a photoelectric detector to receive a laser interference signal, and converting an optical signal into an interference electrical signal; 3, carrying out frequency analysis on the reference electrical signal by utilizing a discrete Fourier transform algorithm to obtain an amplitude sequence and a frequency sequence, utilizing the amplitude sequence and the frequency sequence to calculate the frequency fs of nanoscale vibration to be measured, determining an odd frequency shift attenuation ratio Ro and an even frequency shift attenuation ratio Re, and utilizing the odd frequency shift attenuation ratio Ro and the even frequency shift attenuation ratio Re to determine a characteristic ratio R; 4, utilizing the characteristic ratio R obtained in the step 3, and utilizing an interpolation method to calculate the amplitude As of the nanoscale vibration. The method is suitable for measuring the nanoscale amplitude of medium-high frequency vibration under low-frequency random disturbance.

Description

technical field [0001] The invention relates to a method for measuring the amplitude of nanoscale medium-high frequency mechanical vibration under the submersion of low-frequency and large-amplitude random disturbances in the environment. Background technique [0002] Engineering often encounters the problem of measuring medium and high frequency nanoscale vibrations under low frequency random disturbances, such as the measurement of the amplitude of water surface acoustic waves. Water surface acoustic waves are generated by the sound waves radiated outward from underwater sound sources, and the amplitude of such surface acoustic waves is usually on the order of 10 -9 m. For such weak vibrations, laser interferometry is usually used to measure the amplitude of weak vibrations based on phase demodulation laser interferometry has been widely used in engineering. When the system performance is ideal, this method can achieve 0.1nm resolution. However, weak vibrations such as ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H9/00
Inventor 张晓琳张烈山唐文彦王军
Owner 严格集团股份有限公司
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