High-quality silicon chip cutting fluid

A cutting fluid and silicon chip technology, applied in the petroleum industry, lubricating compositions, etc., can solve the problems of silicon carbide not redispersing, poor redispersing ability, agglomeration, etc., to improve cutting yield, reduce surface damage, and improve thickness effect of error

Inactive Publication Date: 2015-04-08
ZHENJIANG GANGNAN ELECTRIC
View PDF6 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] For the existing cutting fluids at home and abroad, they all have the weakness of poor redispersion ability. After a long time of storage, silicon carbide will be deposited and agglomerated. If you stir again, the silicon carbide cannot be dispersed in the cutting fluid again.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0041] A kind of high-quality silicon wafer cutting fluid, its composition is counted as by weight parts:

[0042] 50 parts of polyethylene glycol,

[0043] 6 parts of salicylic acid,

[0044] 12 parts of sodium thiosulfate,

[0045] 5 parts of triethylene glycol,

[0046] Carboxymethylcellulose 13 parts,

[0047] Sodium alkyl succinate sulfonate 1.2 parts,

[0048] 25 parts of triethanolamine,

[0049] Surfactant 6 parts,

[0050] 6 parts of dispersant,

[0051] 32 parts of water.

[0052] Among them, the surfactant is mixed with sodium lauroyl sarcosine, dodecyl diphenyl ether disulfonic acid, and tetrabutylammonium hydroxide in a ratio of 1:3:2 by weight; the dispersant is acrylic acid and ethylene acid It is formed by mixing at a ratio of parts by weight of 2:3.

example 2

[0054] A kind of high-quality silicon wafer cutting fluid, its composition is counted as by weight parts:

[0055] Polyethylene glycol 60 parts,

[0056] 7 parts of salicylic acid,

[0057] Sodium thiosulfate 10 parts,

[0058] 3 parts of triethylene glycol,

[0059] Carboxymethylcellulose 14 parts,

[0060] Sodium alkyl succinate sulfonate 3 parts,

[0061] 30 parts of triethanolamine,

[0062] Surfactant 5 parts,

[0063] Dispersant 5 parts,

[0064] 30 parts of water.

[0065] Among them, the surfactant is mixed with sodium lauroyl sarcosine, dodecyl diphenyl ether disulfonic acid, and tetrabutylammonium hydroxide in a ratio of 1:3:2 by weight; the dispersant is acrylic acid and ethylene acid It is formed by mixing at a ratio of parts by weight of 2:3.

example 3

[0067] A kind of high-quality silicon wafer cutting fluid, its composition is counted as by weight parts:

[0068] 56 parts of polyethylene glycol,

[0069] Salicylic acid 5 parts,

[0070] Sodium thiosulfate 8 parts,

[0071] 5.5 parts of triethylene glycol,

[0072] Carboxymethylcellulose 12 parts,

[0073] Sodium alkyl succinate sulfonate 2.2 parts,

[0074]28 parts of triethanolamine,

[0075] Surfactant 10 parts,

[0076] Dispersant 10 parts,

[0077] 35 parts of water.

[0078] Among them, the surfactant is mixed with sodium lauroyl sarcosine, dodecyl diphenyl ether disulfonic acid, and tetrabutylammonium hydroxide in a ratio of 1:3:2 by weight; the dispersant is acrylic acid and ethylene acid It is formed by mixing at a ratio of parts by weight of 2:3.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a high-quality silicon chip cutting fluid. The high-quality silicon chip cutting fluid comprises the following components in parts by weight: 50-60 parts of polyethylene glycol, 5-10 parts of salicylic acid, 8-16 parts of sodium thiosulfate, 2-7 parts of triethylene glycol, 10-18 parts of carboxymethylcellulose, 0.5-5 parts of alkyl sodium sulfosuccinate, 25-30 parts of triethanolamine, 4-12 parts of a surfactant, 4-12 parts of a dispersing agent and 30-35 parts of water. The high-quality silicon chip cutting fluid can be used for improving the stability of silicon carbide, has high redispersion capability, and can also be used for improving the cutting yield and greatly reducing the cutting cost.

Description

technical field [0001] The invention relates to a high-quality silicon chip cutting fluid. Background technique [0002] Solar silicon wafer cutting generally uses silicon carbide micropowder with high hardness, small particle size and concentrated particle size distribution as the main cutting medium. Usually, carbonized micropowder should be added to the cutting fluid in a certain proportion, and fully dispersed, and then configured into a uniform and stable cutting mortar, which can then be used for silicon wafer cutting. Using silicon carbide micropowder as the medium in the wire cutting process of solar silicon wafers, the whole mechanism is to make the silicon carbide micropowder particles continuously and rapidly impact the surface of the silicon rod, and use the hard characteristics and sharp corners of the silicon carbide particles to gradually cut off the silicon rod. This process will Accompanied by the large frictional heat release, at the same time, the broken ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): C10M173/02C10N30/04
Inventor 聂金根
Owner ZHENJIANG GANGNAN ELECTRIC
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products