High-quality silicon chip cutting fluid
A cutting fluid and silicon chip technology, applied in the petroleum industry, lubricating compositions, etc., can solve the problems of silicon carbide not redispersing, poor redispersing ability, agglomeration, etc., to improve cutting yield, reduce surface damage, and improve thickness effect of error
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example 1
[0041] A kind of high-quality silicon wafer cutting fluid, its composition is counted as by weight parts:
[0042] 50 parts of polyethylene glycol,
[0043] 6 parts of salicylic acid,
[0044] 12 parts of sodium thiosulfate,
[0045] 5 parts of triethylene glycol,
[0046] Carboxymethylcellulose 13 parts,
[0047] Sodium alkyl succinate sulfonate 1.2 parts,
[0048] 25 parts of triethanolamine,
[0049] Surfactant 6 parts,
[0050] 6 parts of dispersant,
[0051] 32 parts of water.
[0052] Among them, the surfactant is mixed with sodium lauroyl sarcosine, dodecyl diphenyl ether disulfonic acid, and tetrabutylammonium hydroxide in a ratio of 1:3:2 by weight; the dispersant is acrylic acid and ethylene acid It is formed by mixing at a ratio of parts by weight of 2:3.
example 2
[0054] A kind of high-quality silicon wafer cutting fluid, its composition is counted as by weight parts:
[0055] Polyethylene glycol 60 parts,
[0056] 7 parts of salicylic acid,
[0057] Sodium thiosulfate 10 parts,
[0058] 3 parts of triethylene glycol,
[0059] Carboxymethylcellulose 14 parts,
[0060] Sodium alkyl succinate sulfonate 3 parts,
[0061] 30 parts of triethanolamine,
[0062] Surfactant 5 parts,
[0063] Dispersant 5 parts,
[0064] 30 parts of water.
[0065] Among them, the surfactant is mixed with sodium lauroyl sarcosine, dodecyl diphenyl ether disulfonic acid, and tetrabutylammonium hydroxide in a ratio of 1:3:2 by weight; the dispersant is acrylic acid and ethylene acid It is formed by mixing at a ratio of parts by weight of 2:3.
example 3
[0067] A kind of high-quality silicon wafer cutting fluid, its composition is counted as by weight parts:
[0068] 56 parts of polyethylene glycol,
[0069] Salicylic acid 5 parts,
[0070] Sodium thiosulfate 8 parts,
[0071] 5.5 parts of triethylene glycol,
[0072] Carboxymethylcellulose 12 parts,
[0073] Sodium alkyl succinate sulfonate 2.2 parts,
[0074]28 parts of triethanolamine,
[0075] Surfactant 10 parts,
[0076] Dispersant 10 parts,
[0077] 35 parts of water.
[0078] Among them, the surfactant is mixed with sodium lauroyl sarcosine, dodecyl diphenyl ether disulfonic acid, and tetrabutylammonium hydroxide in a ratio of 1:3:2 by weight; the dispersant is acrylic acid and ethylene acid It is formed by mixing at a ratio of parts by weight of 2:3.
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