Composite manufacturing method of optical ultra-broadband anti-reflection coating

Abstract

A combination technology method for an ultra-wideband anti-reflection film includes the steps of vacuum evaporation film forming and sol-gel film forming. According to the technology of vacuum evaporation film forming, for preparation work, all related appliances inside a vacuum room are cleaned, an optical lens is placed into the vacuum room, and film materials are added; vacuumizing is performed; the film materials are preheated; the film materials are gasified and deposited on the surface of the optical lens; baking is performed for 60 minutes; magnesium fluoride layer evaporation is performed; aluminum oxide layer evaporation is performed at the same baking temperature, wherein the thickness of an evaporated film layer is 4 nanometers. The vacuum evaporation film forming technology is implemented from the step (1) to the step (6), and the sol-gel film forming technology is implemented from the step (7) to the step (10). The number of layers of the wideband anti-reflection film is decreased, and the bandwidth region of an existing wideband anti-reflection film is widened. Through a film plating after-treatment technology, the layers of the film have good hydrophobicity and self-cleaning performance, and good environment adaptability is achieved. By the adoption of the combination film forming method, the average transmittance within the waveband range of 300 nm-1000 nm can reach 98.5%.

Description

technical field [0001] The invention relates to the technical field of optical coating processing, in particular to a preparation method of a broadband antireflection film. Background technique [0002] Anti-reflection coated lens is an important optical device, and its application has penetrated into many fields of scientific instruments such as aerospace remote sensing, laser communication, photovoltaic cells, and ground-based telescopic instruments. From the analysis of structural design, the broadband anti-reflection coating lens is a combination of optical substrate and multi-layer dielectric film. In order to increase the transmission bandwidth, three kinds of high, medium and low refractive index materials are usually used to form a multi-layer film. The most commonly used is Al 2 o 3 —ZrO 2 —MgF 2 collocation, but this collocation structure is complex and can only cover a limited spectral bandwidth. [0003] Vacuum anti-reflection film coating process commonly u...

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Problems solved by technology

But its anti-reflection performance needs to be improved

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