Bilateral dislocation differential confocal measuring method

A differential confocal and measurement method technology, applied in the direction of testing optical performance, can solve the problems of improvement and restriction of resolution ability, and achieve the effect of improving signal-to-noise ratio, high signal-to-noise ratio, and improving axial resolution ability

Active Publication Date: 2015-04-29
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, because the existing confocal microscope uses the confocal axial response characteristic curve 13 to fit the top data se...

Method used

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  • Bilateral dislocation differential confocal measuring method
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  • Bilateral dislocation differential confocal measuring method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0062] Combination of specific steps for carrying out single-point height value fitting measurement using the method of the present invention image 3 described as follows:

[0063] Step 1. Select a certain measurement point N(x,y) on the sample 7, make the objective lens 6 focus the light spot to scan the measurement point axially, and at the same time, the photodetector detection 11 detects the confocal axial intensity of the axial position of the sample The response value is 14, denoted as I(z), where x, y and z are the coordinates of the horizontal position and the axial height position of the sample measurement point respectively;

[0064] Step two, such as image 3 As shown, the maximum value M of the confocal axial intensity response value 14 is determined, and the confocal axial intensity response value 14 is divided into a left side data group 15 and a right side data group 16 with M as a boundary;

[0065] Step three, such as image 3 As shown, the data group 16 o...

Embodiment 2

[0071] Under the scanning of the sample workbench, the method of the present invention is used to combine the measurement steps of point-by-point tomographic scanning imaging Figure 6 described as follows:

[0072] Step 1, move the workbench 8, write down the horizontal position coordinates N(x, y) of the measured point of the sample 7;

[0073] Step 2: Feed the objective lens 6 in axial steps relative to the sample 7 along the optical axis, and the photodetector 11 measures the confocal axial intensity response value 14 corresponding to each axial feeding position;

[0074] Step three, such as Figure 5 As shown, each confocal axial intensity response value 14 obtained in step 2 is translated by S along the horizontal coordinate to obtain a shifted confocal axial intensity response value 24, where the value of S is selected as the confocal axial intensity response data set 14 FWHM of the curve;

[0075] Step 4, such as Figure 5 As shown, each confocal axial intensity re...

Embodiment 3

[0083] Under the scanning of the sample workbench, the measurement steps of layer-by-layer scanning tomography using the method of the present invention are combined Figure 6 described as follows:

[0084] Step 1. Focus the objective lens 6 on the first interface of the sample to be tested, and then move the workbench 8. In this interface, the photodetector 11 measures the photoelectric signal values ​​of all the points to be measured, and simultaneously records the levels of all points to be measured. Position coordinates;

[0085] Step 2. According to the measurement accuracy requirements of the sample, select the micro-feeding step of the objective lens relative to the sample;

[0086] Step 3: Feed the objective lens 6 relative to the sample 7 in small steps along the direction of the optical axis, and then accurately move the worktable 8 according to the coordinates of the horizontal position points recorded in step 1, so that the focal spot of the objective lens is alig...

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Abstract

The invention belongs to the technical field of optical imaging and detecting and relates to a bilateral dislocation differential confocal measuring method. According to the method, due to the dislocation differential subtracting process on data sets on the two sides of the confocal axial characteristic curve, the position of the extreme point of a confocal system characteristic curve is accurately obtained. Due to the fact that two sections of data, close to the position of the full width at half maximum and very sensitive to axial displacement, of the cofocal characteristic curve are used for conducting the dislocation differential subtracting processing, the position, calculated by the data sections, of the extreme point of the confocal characteristic curve is more sensitive than that the position, calculated through an existing confocal characteristic curve top fitting method, of the extreme point of the confocal characteristic curve, according to the result of the bilateral dislocation differential confocal measuring method, under the condition that the structure of a confocal microscopy system is not changed, the axial resolving power, the signal-to-noise ratio and the like of the existing confocal microscopy system can be obviously improve, and a new technological approach is provided for the field of confocal imaging or detecting.

Description

technical field [0001] The invention belongs to the technical field of optical imaging and detection, and relates to a bilateral misalignment differential confocal measurement method. Three-dimensional microstructures, microsteps, microgrooves, integrated circuit line widths, surface topography, and surface measurement and positioning can be used. Background technique [0002] The idea of ​​confocal microscopy was first proposed by American scholar M.Minsky in 1957, and he obtained the US patent in 1961, the patent number is US3013467. The confocal microscope places the point light source, point object, and point detector in corresponding conjugate positions, forming an optical microscopic imaging system with unique tomographic capabilities of point illumination and point detection in optical microscopic imaging. [0003] The basic principles of confocal microscopy are figure 1 As shown, the light emitted by the light source 1 passes through the pinhole 3, the beam splitte...

Claims

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Application Information

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IPC IPC(8): G01M11/02
Inventor 赵维谦邱丽荣王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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