Lateral current regulative diode and manufacturing method thereof

Abstract

The invention provides a lateral current regulative diode and a manufacturing method thereof and belongs to the technical field of semiconductor power devices. The lateral current regulative diode is formed by connecting a plurality of cell interdigitals with the same structure, wherein each cell comprise a P-type lightly doped substrate, a diffusion N-type well region, a P-type heavily doped region, a first N-type heavily doped region, a dielectric oxide layer, a metal cathode, a metal anode and a second N-type heavily doped region, wherein each P-type heavily doped region is positioned between the corresponding first N-type heavily doped region and second N-type heavily doped region; each first N-type heavily doped region is partially contained in the corresponding P-type heavily doped region; each first N-type heavily doped region is in short circuit with the corresponding P-type heavily doped region and forms ohm contact with the corresponding metal cathode; each second N-type heavily doped region and the corresponding metal anode form ohm contact. According to the lateral current regulative diode provided by the invention, by the adoption of a PN junction short circuit structure, the area of a chip can be reduced, and the cost is reduced; meanwhile, a N-type well region process is adopted for the P-type substrate, and channel depletion can be assisted for the substrate, so that the depletion of a conducting channel is accelerated, and lower pinch-off voltage is realized.

Description

technical field [0001] The invention belongs to the technical field of semiconductor power devices, and in particular relates to a lateral constant current diode and a manufacturing method thereof. Background technique [0002] The constant current source is a commonly used electronic equipment and device, and it is widely used in electronic circuits. The constant current source is used to protect the entire circuit, even if the voltage is unstable or the load resistance changes greatly, it can ensure the stability of the supply current. A constant current diode (CRD, Current Regulative Diode) is a semiconductor constant current device, that is, a diode is used as a constant current source instead of an ordinary constant current source composed of transistors, Zener tubes and resistors. Currently, constant current diodes The output current is between a few milliamps and tens of milliamperes, which can directly drive the load, achieving the purpose of simple circuit structur...

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Problems solved by technology

[0003] Aiming at the problems of high pinch-off voltage, low breakdown voltage and poor constant current capability of constant current diodes, the present invention proposes a transverse constant current diode and its manufacturing method

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