Cr-Cr nanometer composite metal ceramic coating as well as preparation method and device thereof

A metal-ceramic coating and nano-composite technology, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problems that no major breakthroughs have been made, achieve good interlayer bonding and improve corrosion resistance , Enhance the effect of plasma density

Active Publication Date: 2015-06-17
AEROSPACE PRECISION PROD INC LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to find an alternative technology for electroplating, many years of attempts have been made at home and abroad, but due to the defe

Method used

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  • Cr-Cr nanometer composite metal ceramic coating as well as preparation method and device thereof
  • Cr-Cr nanometer composite metal ceramic coating as well as preparation method and device thereof
  • Cr-Cr nanometer composite metal ceramic coating as well as preparation method and device thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0050] The stainless steel fasteners are fixed on the workpiece frame 12, and the workpiece frame 12 is rotated at a speed of 4 rad / min. Perform plasma cleaning on the fasteners at 100°C, -800V bias, and 2Pa argon environment for 60 minutes; then raise the temperature to 270°C and keep warm; turn on the arc target 11, and perform 2nm Cr under the conditions of 0.02Pa argon, -800V Diffusion layer preparation; turn off the arc target 11, turn on the tubular magnetron sputtering target 9, and use intermediate frequency magnetron sputtering to prepare a 5nm Cr bonding layer under the conditions of 0.4Pa argon and -500V; then reduce the substrate bias voltage, at 0.4Pa The 200nm Cr transition layer was prepared under the condition of argon and -50V; then nitrogen gas was gradually introduced, and the 200nm CrNx support layer was prepared under the condition of 0.4Pa pressure and -50V. Gas flow to maintain pressure balance; continue to maintain the pressure of 0.4Pa and -50V, and pr...

Embodiment 2

[0052] The stainless steel fasteners are fixed on the workpiece frame 12, and the workpiece frame 12 is rotated at a speed of 4 rad / min. Perform plasma cleaning on the fasteners at 450°C, -800V bias, and 2Pa argon environment for 30 minutes; then cool down to 250°C and keep warm; turn on the arc target 11, and perform 10nm Cr at 0.2Pa argon, -1000V conditions Diffusion layer preparation; turn off the arc target 11, turn on the tubular magnetron sputtering target 9, and use intermediate frequency magnetron sputtering to prepare a 100nm Cr bonding layer under the conditions of 1Pa argon and -1000V; then reduce the substrate bias, , -200V conditions for the preparation of 2000nm Cr transition layer; then nitrogen gas is gradually introduced, and the 1000nm CrNx support layer is prepared under the condition of 1Pa pressure and -250V. Pressure balance; continue to maintain the pressure of 1Pa and -250V, and prepare the Cr layer in the 5nm Cr / CrN anti-corrosion layer under the condi...

Embodiment 3

[0054] The stainless steel fasteners are fixed on the workpiece frame 12, and the workpiece frame 12 is rotated at a speed of 4 rad / min. Perform plasma cleaning on the fasteners at 350°C, -1000V bias, and 3Pa argon environment for 30 minutes; then cool down to 250°C and keep warm; turn on the arc target 11, and perform 9nm Cr at 0.15Pa argon, -1000V conditions Diffusion layer preparation; turn off the arc target 11, turn on the tubular magnetron sputtering target 9, and use intermediate frequency magnetron sputtering to prepare a 200nm Cr bonding layer under the conditions of 0.4Pa argon gas and -1000V; then reduce the substrate bias voltage, at 0.9Pa The 1000nm Cr transition layer was prepared under the condition of argon and -200V; then nitrogen gas was gradually introduced, and the 600nm CrNx support layer was prepared under the condition of 0.6Pa pressure and -250V. Gas flow to maintain pressure balance; maintain 0.4Pa pressure and -50V constant, prepare the Cr layer in th...

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PUM

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Abstract

The invention provides a Cr-Cr nanometer composite metal ceramic coating as well as a preparation method and device thereof. The coating is provided with a Cr diffusion layer, a Cr bonding layer, a Cr transition layer, a CrNx supporting layer, a Cr/CrN corrosion-resistant layer and a Cr decoration layer, wherein the CrNx supporting layer satisfies 0<=x<1; the Cr/CrN corrosion-resistant layer is an alternating layer of Cr layers and CrN layers and provided with at least one layer of Cr layer and one CrN layer. The coating provided by the invention has gradual changes of structure and composition, good interlayer bonding and excellent corrosion resistance and comprehensive properties.

Description

technical field [0001] The invention belongs to the technical field of coating material preparation, and specifically relates to a Cr-CrN nanocomposite cermet coating and a preparation method thereof, which can be applied to the surface of various substrate materials, especially for small sizes and Surface treatment or modification of matrix materials with complex surface structures. Background technique [0002] Compared with ion implantation, spraying, electroplating, oxidation, CVD (chemical vapor deposition) and other technologies, PVD (physical vapor deposition) method is one of the most advanced surface treatment technologies at present, and metal or ceramics are prepared by non-polluting vacuum coating technology Coatings to replace traditional anti-corrosion coatings is a development trend in recent years. Many research institutions at home and abroad have made many beneficial attempts, including electron beam evaporation, chemical vapor deposition, ion beam sputteri...

Claims

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Application Information

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IPC IPC(8): C23C14/16C23C14/06C23C14/35C23C14/32
Inventor 胡隆伟杨兵刘燕王川柳阳阳李立堂徐国奇
Owner AEROSPACE PRECISION PROD INC LTD
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