High-toughness anticorrosion CrAlN/Cr2AlC multilayer film coating and preparation method thereof
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A multi-layer film and coating technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve problems such as insufficient performance, achieve excellent corrosion resistance, prevent the existence of penetrating defects, and avoid elements Effects of Interdiffusion and Structural Transformation
Active Publication Date: 2018-11-02
INST OF APPLIED PHYSICS JIANGXI ACADEMY OF SCI
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[0005] The purpose of the present invention is to solve the problem of insufficient wear resistance and corrosion resistance of some key moving pa
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[0031] In this embodiment, a strong, tough and corrosion-resistant CrAlN / Cr 2 The preparation method of AlC multilayer film coating, the steps are as follows:
[0032] (1) Clean and dry the substrate in degreasing agent, alcohol and acetone in turn, and then put it into the vacuum coating chamber;
[0033] (2) Pass argon gas into the vacuum cavity through the anode ion source before the coating, and first utilize ionized argon ions to etch the substrate described in step (1);
[0034] (3) depositing a transition layer on the etched substrate described in step (2);
[0035] (4) Use a CrAl target with an atomic ratio of 1:1 as the deposition target, N 2 and hydrocarbon gas as the reaction gas, respectively, in N 2 The CrAlN film is deposited by arc ion plating technology in a mixed atmosphere with Ar gas, and the Cr-Al-C film is deposited by arc ion plating technology in a mixed atmosphere of hydrocarbon gas and Ar gas. The CrAlN / Cr-Al-C multilayer The film coating is deposi...
Embodiment 1
[0039] Put the substrate after cleaning and drying into the vacuum chamber, first pass argon gas 40sccm into the vacuum chamber, set the current of the linear anode ion source to 0.2A, and the negative bias voltage of the substrate to -200V, and use the ionized argon ions to Etch the substrate for 30 minutes; then use the arc ion plating technology to deposit the Ti bottom layer, the target is a Ti target, the arc current is 70A, the Ar gas pressure is 1.0Pa, and the deposition thickness is 250nm; then the reaction gas N 2 , N 2 The pressure is 4Pa, the arc current is 70A, the bias voltage is -100V, and the deposition thickness is 750nm; the fourth step is to deposit CrAlN / Cr-Al-C coating by arc ion plating technology, the target is CrAl composite target, and the current is 70A. When depositing CrAlN single layer, the reaction gas is N 2 , N 2 The pressure is 4Pa, and the reaction gases are Ar and CH when depositing a Cr-Al-C single layer 4 Mixed gas, the cavity pressure is...
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Abstract
The invention provides a high-toughness anticorrosion CrAlN/Cr2AlC multilayer coating and a preparation method thereof. The preparation method comprises the steps that a matrix is cleaned and dried, etching is conducted on the matrix with argon ions, a transition layer is deposited on the matrix, the CrAlN/Cr-Al-C multilayer film coating is deposited on the surface of the matrix, and low temperature annealing is conducted to obtain CrAlN/Cr2AlC. The transition layer is arranged between the matrix and the CrAlN/Cr2AlC multilayer coating, and according to the multilayer coating, CrAlN hard filmsand Cr2AlC MAX phase films are alternately stacked to form periodic arrangement. The multilayer film coating has high hardness, low internal stress and the high anticorrosion characteristic, and abrasion resistant and anticorrosion lives of the matrix can be prolonged. The problems that a single CrAlN coating is high in hardness but insufficient in toughness, and a single Cr2AlC coating is good in toughness and corrosion resistance but low in hardness are solved. According to the provided preparation method of the multilayer film coating, the multilayer film coating is obtained through the combination of periodic control over the flow of N2 and CH4 reaction gases, with subsequent low temperature heat treatment, the process is simple and easy to control, industrialized production can be achieved, and the prepared multilayer film coating is stable in performance and is suitable for abrasion-resistant anticorrosion protection of tool molds or other moving parts in different environments.
Description
technical field [0001] The invention relates to a strong, tough and corrosion-resistant CrAlN / Cr 2 The invention relates to an AlC multilayer film coating and a preparation method thereof, belonging to the technical field of metal surface coating. Background technique [0002] CrAlN coating has high hardness, good wear resistance, excellent high temperature oxidation and corrosion resistance, etc., which greatly improves the machining efficiency; at the same time, the service life of workpieces with CrAlN coating is longer than those with traditional CrN coating and without coating The workpiece of the layer is greatly improved, so it has been widely used in the field of material surface modification. However, CrAlN as a ceramic material has low toughness due to the restriction of dislocation movement, which limits the preparation of thick films and easily causes CrAlN coating failure during machining. [0003] MAX phase is a new type of ternary layered cermet-like materia...
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