A kind of preparation technology of titanium-based getter

A preparation process and getter technology, which is applied in the field of preparation technology of titanium-based getters, can solve the problems such as the decrease in the gettering ability of materials, easy introduction of harmful gases, oxidation, etc. high speed effect

Active Publication Date: 2016-09-14
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional process preparation process will cause the titanium powder to be oxidized due to its high activity, and it is easy to introduce harmful gases during the mixing or crushing process, or introduce too much carbon residue caused by the introduction of polymers, resulting in a decrease in the gas absorption capacity of the material

Method used

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  • A kind of preparation technology of titanium-based getter
  • A kind of preparation technology of titanium-based getter

Examples

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preparation example Construction

[0016] Such as figure 2 Shown is the flow chart of the preparation process of the titanium-based getter of the present invention. When TiHx is used as raw material, it is mixed with one or more of V, Fe, Nb, Zr, Mn, Al, Mo, Ni, rare earth elements, etc. or alloy powders composed of these elements, and then vacuum desorbed. Hydrogen sintering, and finally a highly active titanium-based getter element is made. The specific operation process is: first weigh a specific mass of TiHx, mix it with other getter elements according to a certain ratio, and then form it, then put the formed billet into the vacuum dehydrogenation and sintering integrated furnace, and evacuate the vacuum in the furnace to 10 -3 ~10 －５ Pa, and heat up to 55-750°C for dehydrogenation. As the dehydrogenation vacuum begins to drop, continue to evacuate to 10 -3 ~10 －５ Pa, after stabilizing for 1-2.5 hours, the temperature is raised to 800-950°C for sintering and forming of the getter, and then the temper...

Embodiment 1

[0020] TiH 2 Mix with Mo according to the mass ratio of 9:1, and then make a green body of a specific shape, and then put it into a vacuum dehydrogenation sintering furnace for dehydrogenation sintering, and vacuumize to 10 －３ Pa, keep it for 1h, stop vacuuming, put in hydrogen to carry out suction reaction, keep the air pressure in the furnace at 1.1MPa, hydrogen flow at 0.6L / min, keep at 900°C for 1.5h, keep the pressure constant, slowly The temperature is lowered to 50° C., and the finished product is ready after cooling. Compared with the air-absorbing element prepared by the traditional process, the air-absorbing rate and air-absorbing capacity are respectively increased by 22% and 24%.

Embodiment 2

[0022] TiH 0.5 Mix with V and Fe according to the mass ratio of 6:1:3, then form a green body of a specific shape, then put it into a vacuum dehydrogenation sintering furnace for dehydrogenation sintering, and vacuumize to 10 -4 Pa, keep it for 1h, stop vacuuming, put in hydrogen to carry out suction reaction, the air pressure in the furnace is kept at 1.1MPa, the hydrogen flow rate is 0.8L / min, keep at 1000°C for 3.5h, after the pressure remains unchanged, slowly The temperature is lowered to 50° C., and the finished product is ready after cooling. Compared with the getter element prepared by the traditional process, the suction rate and the getter capacity are respectively increased by 20% and 23%.

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Abstract

A preparing process of a titanium-based getter is provided. TiHx or a titanium alloy hydride is directly adopted as a raw material, is mixed with elements needed to be added, and shaped. A shaped green body is put into a vacuum dehydrogenation sintering integrated furnace, subjected to dehydrogenation and sintering treatment, and prepared into a gettering element or gettering material of different shapes. The titanium-based getter is prepared by adopting the TiHx or the titanium alloy hydride as the raw material. The chemical performance of the TiHx or the titanium alloy hydride is stable in a preparation process. The TiHx or the titanium alloy hydride is liable to shape with other element additives, and is low in shaping temperature, energy-saving, not liable to pollute and convenient to store. Ti and gettering alloy powder which are newly generated after a vacuum dehydrogenation process of the green body containing the TiHx or the titanium alloy hydride are high in activity. Properties of the titanium-based gettering element prepared by the process are superior to that of products prepared by traditional processes. The surface area of the titanium-based gettering element is greater than 1.1 m2 / g, and the porosity is higher than 50%. Products of the process have characteristics of low activation temperature, high gettering speed, high gettering capacity, and the like.

Description

technical field [0001] The invention relates to a preparation process of a titanium-based getter, belonging to the technical field of getter materials. Background technique [0002] Getters, also known as getters, are a general term for materials that are used to obtain, maintain vacuum and purify gases, etc., and can effectively absorb certain gas molecules. It is mainly used in the preparation of electric vacuum devices, vacuum insulation materials, metal insulators, high-purity inert gases, and some active gases such as N 2 , O 2 、CH 4 , CO, etc. [0003] The traditional preparation process of titanium-based getters is as follows: figure 1 As shown, the powder metallurgy method is used to mix titanium powder and other element additives in a certain proportion, and form them by pressing, coating or filling. Finally, it is sintered and formed under vacuum conditions or under the protection of inert gas to prepare getter components; or it is smelted under the above cond...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22C14/00C22C1/05B22F3/10
Inventor 张心强朱君崔建东苑鹏杨志民杜军
Owner GRIMAT ENG INST CO LTD
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